Biological detection microfluidic chip based on immune reaction and preparation method thereof
A microfluidic chip and immune reaction technology, applied in biological testing, chemical instruments and methods, material inspection products, etc., can solve the problems of consumption of immune reagents, non-specific adsorption, large detection equipment, etc.
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[0031] 1. Substrate preparation. Put the silicon chip into Piranha solution (98% concentrated sulfuric acid: 30% hydrogen peroxide = 7: 3) and boil for 15 min. Rinse five times with deionized water, blow dry with nitrogen, and bake at 200 °C for 30 min.
[0032] 2. Shake the paint. Pour Microchem's SU-8 glue (the same below) on the center of the silicon wafer, hold the edge of the silicon wafer with your hand to tilt it and rotate it slowly, so that SU-8 covers most of the silicon wafer. Let it stand for 15 minutes to make SU-8 preliminarily flattened and eliminate the air bubbles generated during the pouring process. Use a spin coater (Spin-Coater KW-4A, Chemat Technology, Inc.) to carry out two progressive spin coatings: 500 rpm spin coating for 15 s, 3000 rpm spin coating for 30 s, so that the glue distribution is relatively uniform, static Leave it on for 10 minutes to alleviate the edge protrusion effect.
[0033]3. Soft baking. The purpose of soft baking is to volat...
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