Method for collecting silicon powder from slurry generated during back lapping process using centrifuge, and centrifuge therefor

Abstract

There are provided a method for collecting silicon powder from slurry generated during a back lapping process by using a centrifuge, and the centrifuge therefor. The method for collecting silicon powder from slurry generated in a back lapping process by using a centrifuge with a bowl and a screw shaft being both installed horizontally, comprises: a collection step S1 of collecting silicon powder on inner surface of the bowl of the centrifuge in which the slurry is supplied while stopping the screw shaft and rotating the bowl at high speed so that the silicon powder and fluid are separated from the slurry, the separated silicon powder is collected on inner surface of the bowl and the fluid is discharged to a fluid outlet for a time predetermined to collect the silicon powder on inner surface of the bowl; and a discharge step S2 of discharging the silicon powder collected on inner surface of the bowl in which supply of the slurry stops, the bowl rotates at reduced speed to maintain the collected silicon powder on inner surface of the bowl, and the screw shaft which stops in the collection step S1 rotates to discharge the silicon powder collected on inner surface of the bowl for a time predetermined to discharge the silicon powder collected on inner surface of the bowl in the collection step S1.

Description

technical field [0001] The present invention relates to a method for collecting silicon powder from a waste slurry produced by a back lapping process using a centrifuge to collect silicon powder from a waste slurry produced by a back lapping process, and to a centrifuge used in the process . Background technique [0002] Generally, materials are mainly classified into conductors, semiconductors, and insulators according to their electrical conductivity. In a pure state, semiconductors exhibit properties similar to insulators. However, the conductivity of a semiconductor increases by adding impurities, or the semiconductor temporarily becomes conductive by light or thermal energy. [0003] Semiconductors are widely used in the high-tech electronics industry, for example, in addition to integrated circuit devices including diodes, transistors, etc., there are thermal electron emission devices, charge-coupled devices (CCDs) such as electronic cameras, and the like. Semicondu...

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Problems solved by technology

[0016] However, the method of using a filter to collect silicon powder has the following disadvantages: the filter needs to be replaced frequently, when the amount of silicon powder contained in the waste slurry is small, the amount of the collected silicon powder is small, the collection performance is low, and because the filter components are mixed with the collected silicon powder, which has a lower purity

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