Pressure switch based on micro-electromechanical system technology

Abstract

The invention relates to a pressure switch based on the micro-electromechanical system (MEMS) technology. The pressure switch comprises a base and a pipe cap, wherein the pipe cap is provided with a pressure leading mouth; the base is provided with a groove, the other end of the base is provided with a cable hole; a cable is arranged in the cable hole; a switching component is arranged in the groove and provided with a sensitive component; the switching component contains a supporting body which is provided with a lower diversion hole and conducting cylinders; the sensitive component containsa clamping body and a silicon wafer; the silicon wafer is provided with a metal layer, elastic slots are formed on the lower part of the silicon wafer; a boss is formed between the elastic slots, an upper electrode is arranged on the boss; the clamping body is provided with a diversion hole; the surfaces of the both ends of the clamping body and the inner wall of the upper diversion hole form a lower electrode; the lower electrode and the metal layer are separately electrically connected with the corresponding conducting cylinders on the supporting body through internal leads; and the conducting cylinders are electrically connected with connecting leads respectively. The pressure switch of the invention has simple structure, good consistency and low cost and is easy to be integrated with the following circuit for signal conditioning, signal conversion and networking, thus the pressure switch has wide application range.

Description

technical field [0001] The invention relates to a pressure switch, in particular to a pressure switch based on MEMS technology. Background technique [0002] Pressure switches are widely used in technical fields such as industry, agriculture, scientific research, construction, aerospace and military. However, traditional pressure switches are mostly mechanical structures, which have the disadvantages of large volume, low mass production, poor consistency, and difficult integration with subsequent circuits. Therefore, traditional pressure switches are being replaced by electronic pressure switches. At present, most of the electronic pressure switches used in the above fields use linear pressure sensors to detect the pressure, and then use the linear pressure to complete the switch function when it reaches the rated value. However, a linear pressure sensor is more complex and accurate than a pressure switch in terms of the complexity of the process or the amount of informatio...

AI Technical Summary

Problems solved by technology

Therefore, some pioneers have begun to use MEMS technology to make pressure switches, but the reported pressure switches are difficult to be further popularized due to their narrow rated working pressure range and limited to individual application fields.

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