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Two-dimensional uncoupled nano-scale motion platform mechanism

A motion platform, non-coupling technology, applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electrical components, etc., can solve processing, assembly technology constraints, low displacement resolution, multi-dimensional Motion coupling and other issues, to achieve the effect of improving assembly and controllability, reducing design difficulty, and smooth and precise guidance

Inactive Publication Date: 2011-02-09
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are generally problems such as low displacement resolution, gaps or multi-dimensional motion coupling.
Therefore, the research on precise nano-manipulation, processing and assembly technology has been greatly restricted.

Method used

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  • Two-dimensional uncoupled nano-scale motion platform mechanism
  • Two-dimensional uncoupled nano-scale motion platform mechanism
  • Two-dimensional uncoupled nano-scale motion platform mechanism

Examples

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Embodiment

[0018] Example: such as figure 1 , figure 2 As shown, the present invention includes a moving platform 3, an inner frame 4, and an outer frame 6, which are staggered and connected through flexible guiding ribs 1 to form an integrated structure, that is, a symmetrical frame of the inner frame 4 is connected with the moving platform 3 with A flexible guiding rib 1 is connected between another symmetrical frame and the outer frame 6, and a flexible guiding connecting rib is connected between the moving platform 3 and the inner frame 4, and the other pair of frames between the inner frame 4 and the outer frame 6 are respectively symmetrically arranged. A piezoelectric ceramic driver 5 and a pre-tensioned drive spring 2 are provided, and the piezoelectric ceramic driver 5 is connected with an external controller.

[0019] The flexible guide connecting rib 1 described in this example is composed of a plurality of sheet plates juxtaposed, and may have slight deformation during oper...

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Abstract

The invention relates to a two-dimensional uncoupled nano-scale motion platform mechanism which belongs to the technical field of nano-scale displacement outputting and positioning. The mechanism comprises a moving platform, an inner framework and an outer framework which are crossly connected to form an integral structure through flexible guide connecting rib plates, i.e. a flexible guide connecting rib plate is connected between a symmetrical border of the inner framework and the moving platform, and a flexible guide connecting rib plate is connected between the other symmetrical border and the outer framework; the other pair of borders between the moving platform and the inner framework as well as between the inner framework and the outer framework are respectively and symmetrically provided with a piezoelectric ceramic driver and a preloaded driving spring; and the piezoelectric ceramic driver is connected with an outer controller. In the invention, the connecting structure of the separate frameworks and the flexible connecting rib plates is adopted to ensure that X and Y axial motions are independent so as to realize the steady and precise guide of platform motions, and the integral structure is simple and compact; and the driving mode of combining the piezoelectric ceramic driver with the preloaded driving spring can reach a nano / subnano driving displacement resolution so as to reduce the driving control design difficulty of the platform, thereby the assembly ability and the controllability of the whole platform are improved.

Description

technical field [0001] The invention belongs to the technical field of nanoscale displacement output and positioning, in particular to a two-dimensional non-coupling nanoscale motion platform mechanism driven by piezoelectric ceramics. Driven by two one-dimensional piezoelectric ceramic drivers, the platform mechanism can realize two-dimensional uncoupled nanoscale motion. Background technique [0002] With the rise and rapid development of nanotechnology, high-precision, high-resolution, and high-reliability nanoscale motion platform systems are widely used in many high-tech fields such as microelectromechanical systems, nanomanufacturing technology, microelectronics and nanoelectronics technology, and nanobiological engineering. will play an increasingly important role. [0003] The traditional mechanism forms used for nanoscale motion platforms mainly include: mechanical transmission type (such as sliding guide rail and rolling guide rail, etc.), friction transmission ty...

Claims

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Application Information

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IPC IPC(8): H02N2/02
Inventor 董再励刘柱丁晓辉周磊
Owner SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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