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Capacitive sensor and actuator

A capacitive sensor and actuator technology, applied in the direction of converting sensor outputs, instruments, and using electromagnetic/magnetic devices to transmit sensing components, can solve the problems of unfavorable sensors or actuators, difficult realization of size, etc., and achieve simple realization and realization. Geometric shapes, effects that simplify use

Inactive Publication Date: 2011-04-06
ROBERT BOSCH GMBH
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  • Abstract
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Problems solved by technology

[0008] However, the disadvantage of such differential capacitors is that additional electrodes are required, which is disadvantageous for sensors or actuators in the field of micromechanics, since the necessary dimensions can only be achieved with difficulty

Method used

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  • Capacitive sensor and actuator
  • Capacitive sensor and actuator

Examples

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Embodiment Construction

[0024] according to figure 1 The capacitive sensor comprises a not shown oscillating mass which is fixed deflectably on an immovable substrate or, for example, on another movable mass. The deflectability of the oscillating mass can be achieved by fastening it to the base with one or more springs of defined stiffness. Furthermore, a first comb electrode 1 with a plurality of comb teeth 2 is fastened to this oscillating mass, a second comb electrode 1 with a plurality of comb teeth 2' is fastened to a substrate or another movable mass. Electrode 1'. Comb teeth 2 and 2 ′ of comb electrodes 1 and 1 ′ are aligned parallel to one another and engage in one another in a comb-like manner such that they form overlapping regions in the rest state. The comb teeth 2 and 2' thus create a capacitor, wherein the overlapping area is the area that contributes to the capacitance of the capacitor.

[0025] Furthermore, the comb electrodes 1 and 1' are fastened on the oscillating mass or substr...

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Abstract

A capacitive sensor and a capacitive actuator having at least one seismic mass deflectably mounted on a substrate. A comb electrode (1) having comb fingers (2) is mounted on the seismic mass, and a comb electrode (1') having comb fingers (2') is mounted on the substrate in such a way that the comb fingers (2,2') are situated parallel to a deflection direction (3) of the seismic mass and interlock in a comb-like manner. The characteristic curve of the sensor or actuator is adjusted by optimizing the geometry of at least one comb electrode (1,1'), in particular of at least one comb finger (2,2').

Description

technical field [0001] The invention relates to a capacitive sensor and actuator having at least one oscillating mass mounted deflectably on a substrate, wherein a comb electrode with comb teeth is mounted on the oscillating mass and a A comb electrode with comb teeth which are arranged parallel to the direction of deflection of the oscillating mass and mesh into each other in a comb-like manner. Background technique [0002] Sensors are known in many technical fields. In particular micromechanical sensors are used, for example, in automotive technology, industrial technology and medical technology, but also in other fields of consumer electronics as acceleration sensors, rotational speed sensors or pressure sensors. In particular capacitive sensors are widely used here. [0003] Capacitive sensors are based on spring-mass systems, in which an oscillating mass is deflected against a predetermined restoring force relative to the substrate, for example by occurring accelerat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/24G01P15/125G01B7/14
CPCH02N1/008B81B3/0094G01P15/125B81B2201/0235G01D5/2412B81B2201/0221B81B2201/033
Inventor A·弗兰克A·布曼M·凯克
Owner ROBERT BOSCH GMBH
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