Composite micro-electro-mechanical system (MEMS) high-temperature resistant ultrahigh-pressure sensor
An ultra-high pressure, composite technology, used in instruments, measuring forces, measuring devices, etc., can solve the problems of low sensor sensitivity, narrow application range, and high signal processing circuit requirements.
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[0024] specific implementation plan
[0025] The structural principle and working principle of the present invention will be described in more detail below in conjunction with the accompanying drawings.
[0026] refer to figure 1 , a composite MEMS high-temperature-resistant ultra-high pressure sensor, including a base 1, a silicon beam sensitive element 2, a high-temperature adapter plate 4 and a housing 6 assembled on the base 1, and a Wheatstone bridge is designed on the silicon beam sensitive element 2, The gold wire lead 3 connects the Wheatstone bridge and the high-temperature adapter plate 4, the high-temperature cable 5 passes through the fixed wire cap 7 on the shell 6 and connects the high-temperature adapter plate 4 and the external circuit, and the base 1 is composed of a pressure-bearing elastic element 8 and a belt The threaded base is integrated, the lower section is the threaded base, the middle section is the pressure elastic element 8, and the upper end is t...
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Abstract
Description
Claims
Application Information
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