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Method for making self-supporting structure of nano fluid system based on SU-8 photoresist

A self-supporting structure, SU-8 technology, used in nanotechnology, microstructure technology, microstructure devices, etc., can solve problems such as increasing process complexity and manufacturing cost, and nanoimprinting technology cannot process micro-nano composite structures at the same time. , to achieve the effect of low production cost, simple and controllable method, and low production week

Inactive Publication Date: 2012-11-21
HEFEI UNIV OF TECH
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Problems solved by technology

However, nanofluidic systems include nanoscale channels and large sample cell structures. Nanoimprinting technology cannot process such micro-nano composite structures at the same time, and it is often necessary to combine conventional micron processing methods to fabricate such large sample cell structures. Size structure
This undoubtedly puts forward high requirements on the alignment process and precision, which increases the complexity of the process and the production cost

Method used

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  • Method for making self-supporting structure of nano fluid system based on SU-8 photoresist

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Embodiment Construction

[0025] The fabrication method of the nanofluidic system self-supporting structure based on SU-8 photoresist in the present embodiment operates as follows:

[0026] 1. Make PDMS soft template:

[0027] Cleaning treatment of holographic gratings 1, see figure 1 a. Configure PDMS viscous liquid, the PDMS viscous liquid after stirring and mixing will form a lot of bubbles, and the bubbles will gradually disappear after standing for about 30 minutes. Bench bake to cure PDMS 2 at 90°C for 60 minutes, see figure 1 B. Finally, use tweezers to remove the cured PDMS stamp 2. At this time, the PDMS 2 has replicated the micro-nano structure of the holographic grating. See figure 1 c.

[0028] 2. Fabrication of fluid channel base:

[0029] First, clean and treat the glass substrate 3, ultrasonically treat the glass substrate 3 with acetone for 5 minutes, rinse with deionized water and blow dry, then bake in an oven at 130°C for 30 minutes and cool naturally; secondly, make a PDMS sacr...

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Abstract

The invention discloses a method for making a self-supporting structure of a nano fluid system based on a SU-8 photoresist, which is characterized by comprising the following steps of: firstly processing and making a PDMS (Polydimethylsiloxane) flexible template, making a SU-8 nano channel substrate by utilizing the PDMS flexible template, simultaneously making a SU-8 bonding layer comprising a sample pond by utilizing ultraviolet exposure development, realizing the bonding sealing of the SU-8 nano channel substrate and the bonding layer by utilizing a bonding technique, and finally removing PDNS and PET (Polyethylene Terephthalate) flexible substrates to obtain the self-supporting structure of the nano fluid system. The method has the advantages of simple operation, low making cost and low equipment requirement. The making result shows that the system has no delamination and blockage, the bonded interface can be hardly seen, and the outline of a channel is clear and visible so that the self-supporting structure of the nano fluid system has good quality.

Description

technical field [0001] The invention relates to a method for making a self-supporting structure of a nanofluid system, and more specifically relates to the use of polydimethylsiloxane (polydimethylsiloxane, PDMS for short) soft stamps and polydimethylsiloxane (PDMS) and poly Polythylene terephthalate (PET for short, also including PETP) soft substrate is used as a sacrificial layer in the processing of nano-fluid systems, and belongs to the technical field of micro-nano fluid systems. Background technique [0002] As a new field, nanofluidic system has attracted the attention of many researchers, because the nanofluidic channel included in it has a cross-section in the range of hundreds to several nanometers, and its size may be different from that of solute or fluid in the fluid. The molecules of the solvent itself are at the same order of magnitude, so the fluid transport in it has specific properties, which can change many physical and chemical properties that dominate th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/00B82Y40/00B81C1/00
Inventor 王旭迪李小军郑正龙李鑫金建田扬超付绍军
Owner HEFEI UNIV OF TECH
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