Method for producing a metal oxide layer with a predetermined structure by arc evaporation

An oxide, metal technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve problems such as spark discharge interruption

Active Publication Date: 2017-03-15
OERLIKON SURFACE SOLUTIONS AG PFAFFIKON
View PDF9 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Depending on the design of the power supply (magnetic field, location and type of gas inlet), this can cause the conductive region on the target (cathode) where the spark runs to shrink itself and eventually lead to an interruption of the spark discharge

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for producing a metal oxide layer with a predetermined structure by arc evaporation
  • Method for producing a metal oxide layer with a predetermined structure by arc evaporation
  • Method for producing a metal oxide layer with a predetermined structure by arc evaporation

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0038]According to the invention, the structure of the oxide to be deposited can be read out on the basis of the phase diagram of the metal or semimetal components used to synthesize the oxide. This means that eg for ternary Al-Cr-O, reference is made to the Al-Cr binary phase diagram. For quaternary oxides, reference is made accordingly to the ternary phase diagram of the metal or semimetal forming the oxide. The target for arc evaporation is then formed from a metal or semimetal which is the metal or semimetal used to form the oxide of the corresponding structure to be formed. The composition of the target is selected such that the temperature of the transition to the liquid phase according to the phase diagram satisfies the formation temperature condition of an oxide having a desired structure. Oxide formation is then achieved by the reaction of the evaporated target or the target to be evaporated with oxygen.

[0039] This means that in order to produce a certain desired...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
particle diameteraaaaaaaaaa
Login to view more

Abstract

The present invention relates to a method of fabricating layers composed of ternary and higher order oxides of metal and semimetal components, wherein the formation temperature of these oxides is substantially controlled by the composition of the binary (or higher order) alloy target ( Based on the phase diagram).

Description

technical field [0001] The invention relates to a method for producing a metal oxide layer with a predetermined structure by arc evaporation according to the preamble of claim 1 . [0002] The invention relates in particular to the fabrication, selection and operation of so-called "alloy targets", ie targets consisting of at least two metallic and / or semi-metallic components serving as evaporation sources in cathodic arc evaporation. [0003] The invention is especially important for "alloy targets" composed of metals with widely differing melting temperatures. [0004] These alloy targets are defined as having at least two metallic components, but these metallic components may also be present as intermetallic compounds and / or mixed crystals. Background technique [0005] Powder metallurgy targets in this context are microscopes that are made of powders of metals, semi-metals, intermetallics, mixed crystals, and where powder particles can still be discerned after this manuf...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/32C23C14/34C23C14/08
CPCB22F2998/00C22C1/0416C23C14/0036C23C14/08C23C14/081C23C14/083C23C14/325C23C14/3414Y10T428/12028B22F3/15
Inventor J·拉姆
Owner OERLIKON SURFACE SOLUTIONS AG PFAFFIKON
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap