X-ray sensor and manufacturing method thereof

Abstract

The invention relates to an X-ray sensor and a manufacturing method thereof. The X-ray sensor comprises a plurality of sensing units, wherein each sensing unit comprises a photoelectric sensing element area and a switching element area; the photoelectric sensing element area is provided with a photoelectric sensing element; the switching element area is provided with a switching element, a first passivation layer and a shading layer covering the switching element; the first passivation layer is arranged between the switching element and the shading layer; the switching element comprises a conductive layer which extends to the photoelectric sensing element area; the photoelectric sensing element comprises a photoelectric conversion layer and an etching protection layer; the conductive layer and the etching protection layer are respectively formed on two sides of the photoelectric conversion layer so as to form two electrodes of the photoelectric sensing element; and the shading layer extends to the photoelectric sensing element area and is electrically connected with the etching protection layer. The X-ray sensor is simple in manufacturing method and low in cost.

Description

technical field [0001] The invention relates to an X-ray sensor and a manufacturing method thereof. Background technique [0002] With the gradual enhancement of people's self-care awareness, various non-invasive medical detection methods are favored by people. Among many non-destructive detection methods, computed tomography technology has been widely used in our real life. In the composition of computer tomography equipment, an indispensable part is the X-ray sensor. [0003] The basic structure of flat panel X-ray sensor is as follows: figure 1 As shown, each sensing unit of the X-ray sensor 12 includes a photodiode 13 and a field effect transistor (Field Effect Transistor, FET) 14, the gate of the field effect transistor 14 is connected to the scanning line of the X-ray sensor 12 (Gate Line) 15 is connected, the drain of the field effect transistor 14 is connected to the data line (Data Line) 16 of the X-ray sensor 12 , and the photodiode 13 is connected to the source...

AI Technical Summary

Problems solved by technology

Due to the relatively high cost of the mask plate, the manufacturing process of the X-ray sensor is complicated, the manufacturing cost is high and the structure is complicated.

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