Ultra-high resolution optical microscope imaging method and device

Abstract

The invention discloses an ultra-high resolution optical microscope imaging method and device. In the technical scheme, a special lighting illumination and microscope imaging method combining narrow-band filtering, annular aperture and dark-filed illumination is adopted, and annular transmitting apertures with different numerical apertures, transmittances and filtering characteristics are designed, so that the ultra-high resolution and high-contrast microscope imaging on a micro-nano-sized substance can be realized. The device comprises a high-resolution optical microscope system consisting of an LED (light-emitting diode) lighting source, a light barrier, an annular transmitting hole, a condensing lens, a sample platform, a light-shading wafer, a microscope objective and a microscope image collecting and processing system, wherein the microscope image collecting and processing system consists of a CCD (Charge Coupled Device) image sensor, an imaging collecting card and a computer. The invention can maintain the real-time, direct and non-scanned imaging observation way of conventional optical microscopes, and also embodies excellent resolution and imaging contrast.

Description

technical field [0001] The invention belongs to the field of optical microscopy technology, and in particular relates to an ultra-high resolution optical microscopy imaging method and device. Background technique [0002] With the vigorous development of micro-nano technology, people have higher and higher requirements for instruments that can observe and study substances at the level of cells, nanometers and even atoms. Although the resolution of scanning electron microscope (SEM), scanning tunneling microscope (STM), atomic force microscope (AFM) and near-field optical microscope (SNOM) developed in recent decades can reach the micronano level, there are still huge equipment, The disadvantages are high price, complicated operation, etc. At the same time, the sample images obtained by them are scanned and reconstructed, which cannot realize real-time and direct observation and imaging of samples like optical microscopes. Therefore, the general optical microscope is still w...

AI Technical Summary

Problems solved by technology

Simply increasing the aperture angle can only increase the N.A. to 0.95, even if the oil immersion objective lens is used, the maximum N.A. can only reach 1.5

Moreover, using the above method to further improve the resolution of the optical microscope on the original basis will inevitably increase the technical difficulty and cost of the equipment sharply.

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