Methods of fabricating graphene using alloy catalyst

Abstract

Methods of fabricating graphene using an alloy catalyst may include forming an alloy catalyst layer including nickel on a substrate and forming a graphene layer by supplying hydrocarbon gas onto the alloy catalyst layer. The alloy catalyst layer may include nickel and at least one selected from the group consisting of copper, platinum, iron and gold. When the graphene is fabricated, a catalyst metal that reduces solubility of carbon in Ni may be used together with Ni in the alloy catalyst layer. An amount of carbon that is dissolved may be adjusted and a uniform graphene monolayer may be fabricated.

Description

technical field [0001] Exemplary embodiments relate to methods of manufacturing graphene using alloy catalyst layers. Background technique [0002] Graphene is a single layer structure of carbon in which the carbon atoms are arranged in a chemically stable hexagonal (honeycomb) lattice. The electrical properties of graphene are semimetallic because its conduction and valence bands overlap only at the Dirac point. The electron transport mechanism of graphene is ballistic, and the effective mass of electrons is zero. Thus, graphene can be used as a channel with high electron mobility to fabricate field effect transistors. 10 8 A / cm 2 A current density of 100 times that of copper (Cu) can flow in graphene. Since a single layer of graphene has a visible light absorption level of about 2%, the graphene layer is transparent. Furthermore, graphene is considered a rigid material given its Young's modulus of about 1 Pa. [0003] Due to the above physical, optical and mechanica...

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Problems solved by technology

However, in this method, graphene and graphite are mixed during the fabrication process, making it difficult to synthesize a uniform graphene monolayer

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