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Thyristor device

A technology of silicon devices and injection regions, which is applied in the direction of electric solid devices, semiconductor devices, electrical components, etc., can solve the problems of low maintenance voltage of thyristors, high trigger voltage of thyristors, and affecting the normal operation of chips, so as to save Layout area, reduced layout area, and good device robustness

Inactive Publication Date: 2012-08-22
ZHEJIANG UNIV
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Problems solved by technology

[0010] Therefore, in the prior art, the trigger voltage of the thyristor is generally high, which cannot effectively protect the working voltage of 5V and below; at the same time, the maintenance voltage of the thyristor is usually too low, which is prone to latch-up effect and affects the normal operation of the chip. Work

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Embodiment Construction

[0027] The present invention will be described in detail below in conjunction with the embodiments and accompanying drawings, but the present invention is not limited thereto.

[0028] Such as Figure 4 and Figure 5 As shown, a thyristor device includes a P-type substrate 41, and a first N well 42 connected to the electrical anode and a second N well 43 with a floating potential are arranged on the P-type substrate 41 along the lateral direction. The N well 42 and the second N well 43 are not connected;

[0029] From the first N well 42 to the direction of the second N well 43, in the first N well 42, the second N well 43 and the area where no N well is set on the P-type substrate 41, the first N+ Implantation region 44, first P+ implantation region 45, third N+ implantation region 49, second N+ implantation region 46 and second P+ implantation region 47;

[0030] Wherein, the first N+ implantation region 44 and the first P+ implantation region 45 are arranged in the first...

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Abstract

The invention discloses a thyristor device, which comprises a P-type substrate, wherein a first N well and a second N well are arranged on the P-type substrate; the first N well is connected with an anode; the potential of the second N well suspends; and a third N+ injection region is bridged between the two N wells and the P-type substrate. A triggering voltage value is reduced by bridging the third N+ injection region between the first N well and the P-type substrate, and a maintaining voltage value is increased by adding the second N well which has the suspending potential into the P-type substrate, so that the aim of a low-triggering and high-maintaining voltage is achieved. Moreover, the thyristor device is simple in structure, high in layout efficiency of unit area, uniform in current, good in robustness, and stable and reliable.

Description

technical field [0001] The invention belongs to the field of electrostatic protection of integrated circuits, and in particular relates to a thyristor device. Background technique [0002] The phenomenon of electrostatic discharge (ESD) in nature poses a serious threat to the reliability of integrated circuits. In the industry, 30% of the failures of integrated circuit products are caused by electrostatic discharge, and the increasingly smaller process size and thinner gate oxide thickness greatly increase the probability of integrated circuit damage by electrostatic discharge. Therefore, improving the reliability of integrated circuit electrostatic discharge protection has a non-negligible effect on improving the yield of products. [0003] The modes of electrostatic discharge phenomena are usually divided into four types: HBM (Human Body Model), MM (Machine Discharge Model), CDM (Component Charge Discharge Model) and Field Induction Model (FIM). The two most common elect...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/02H01L27/092H01L29/36
Inventor 苗萌董树荣李明亮吴健韩雁马飞宋波郑剑锋
Owner ZHEJIANG UNIV
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