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Method using emission spectrum for diagnosing space distribution character of low-pressure plasma torch

A technology of plasma torch and spatial distribution, which is applied in the field of high-sensitivity emission spectroscopy measurement, and can solve the problems of affecting experimental conditions and measurement accuracy, wasting time, and low spatial resolution

Active Publication Date: 2011-09-14
DALIAN UNIV OF TECH
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Problems solved by technology

However, due to the limitation of the vacuum environment and the vacuum chamber, the method that is feasible in the atmospheric pressure environment is difficult to operate in the low pressure environment. If the experiment is stopped every time, the vacuum chamber is opened, the detection position is adjusted and the vacuum is re-tested, it will not only waste time. , will also affect the experimental conditions and measurement accuracy
Moreover, the spatial resolution of the lattice fiber for spatial resolution is low.

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Embodiment Construction

[0032] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0033] The principle of the method for diagnosing the spatial distribution characteristics of low-pressure plasma torches by emission spectrum of the present invention is as follows:

[0034] There are many ways to generate a plasma torch. The basic principle is to make the flowing gas generate expanded plasma through discharge, and the plasma is ejected from a specific nozzle to form a plasma torch. For example, in the DC arc plasma torch commonly used in industrial and laboratory environments, a DC voltage is applied between the two electrodes, and a high-frequency arc is used, that is, a high-frequency voltage is passed between the cylindrical cathode and the ring-shaped anode to make the gas between the two electrodes When it is broken down and ionized, a large number of electrons generated move rapidly under the action of the electric field gener...

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Abstract

The invention discloses a method using an emission spectrum for diagnosing the space distribution character of a low-pressure plasma torch. The method adopts a computer to control a precise two-dimensional electric platform to control the measuring point to move; for the diagnosis on the space distribution character of the plasma torch, especially the low-pressure plasma torch, the space two-dimensional distribution of the luminous intensity, electron temperature, electron density, molecular rotation temperature and the molecular vibration temperature of the plasma torch can be obtained through analyzing the full spectrum obtained, and the space two-dimensional distribution has high sensitivity and spatial resolution.

Description

technical field [0001] The invention relates to a high-sensitivity emission spectrum measurement technology with high spatial resolution capability, which is used for diagnosing plasma torches, especially low-pressure plasma torches, and can obtain the luminous intensity, electron temperature, electron density, and molecular weight of the plasma torch. Spatial distribution information such as rotation temperature and molecular vibration temperature. Background technique [0002] As a common method in industry, plasma torch technology has been widely used in the fields of spraying, cutting, chemical vapor deposition, hazardous waste treatment, plasma and tokamak wall material interaction, etc. [0003] The basic principle of the plasma torch is to form an arc discharge between the two electrodes, a gas flow is passed between the two electrodes, the gas is ionized, heated, and expanded, and the formed plasma is ejected from the nozzle to form a plasma jet, that is, the plasma ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J47/00
CPCG01N21/67
Inventor 丁洪斌李聪吴兴伟王宏北张辰飞
Owner DALIAN UNIV OF TECH
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