Laser interference detection method and system for dynamic indexes of rotary table

Abstract

The invention relates to a laser interference detection method for the dynamic indexes of a rotary table. The laser interference detection method is used for carrying out real-time dynamic collection and measurement on the continuous changes of angle positions of the rotary table during angle swing or angle oscillation by adopting a laser interference theory. An angle interference mirror is arranged in a light path between a laser and an angle reflecting mirror, and a laser beam is divided into two by a beam splitter mirror in the angle interference mirror; one part of the beam directly passes through the interference mirror, and is reflected back to the laser from half of the angle reflecting mirror with the angle swing; the other beam passes through the angle beam splitter mirror of the angle interference mirror, and is transmitted to the other half of the angle reflecting mirror; the angle reflecting mirror ensures that the beam passes through the interference mirror and returns to the laser; an optical path difference is formed between the two measuring beams; and the changes of the optical path difference are counted by an optical grating counter in the laser, and is converted into an angle dynamic measurement value or a dynamic angle error by computer processing. The laser interference detection method disclosed by the invention has the advantages of high detection accuracy, high sampling rate of detection, complete conformity with requirements of quantity value transmission and traceability to national reference. In the invention, the laser interferometer mainly used for detecting a numerically-controlled machine tool and a three-coordinate measuring machine is used for detecting the dynamic performance indexes of the rotary table.

Description

technical field [0001] The invention relates to a laser interference detection method and a detection system for detecting dynamic indicators of a turntable. The technology belongs to the field of detection and calibration of inertial technology test equipment, and can be widely used in the detection and detection of single-axis, double-axis and three-axis dynamic test turntables. calibration. Background technique [0002] When the test turntable works in the state of angular vibration, since its angular displacement-time is a dynamic curve, capturing and measuring this change requires sensors or instruments with high sampling rate and high precision. At present, no matter in the field of inertial technology testing at home or abroad, it is difficult to detect the dynamic indicators related to the turntable, so there is no unified detection standard and method, and the self-test method of the turntable currently used by each turntable development unit cannot Meet the requir...

AI Technical Summary

Problems solved by technology

[0007] The object of the present invention is to provide a laser interference detection method and a detection system for the dyn

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