Electric control system of corrosion converting machine

Abstract

The invention relates to an electric control system of a corrosion converting machine. The system is characterized in that four analogue quantity input ends of a PLC (programmable logical controller) are connected with a liquid level sensor X01, a liquid level sensor X02, a liquid level sensor X03 and a water outlet flowmeter X00 respectively; and two output end relays of the PLC control a water inlet valve Y60 and a water outlet valve Y61 respectively. As multiple liquid level sensors are set to measure the water quantity data of a pure water temporary storage tank and the program and process flow of the PLC are improved to increase the stored water quantity of the pure water temporary storage tank, the water filling process does not take the effective work time, a corrosion converting machine does not have a water filling wait state and can continuously perform the corrosion conversion and washing flow without interruption, the water filling time is minimized, the production efficiency of equipment is improved, and the water consumption and power consumption of a single corrosion converting sheet are reduced.

Description

technical field [0001] The invention relates to a chip corrosion machine, in particular to an electric control system for a wafer corrosion machine. Background technique [0002] The anti-corrosion machine is the equipment for chip production and processing. At present, the anti-corrosion machine imported from Japan is used in China. The overall performance is good, but in actual use, it is found that its electronic control system still has deficiencies. After careful analysis and research, it is found that its There are unreasonable places in the program control and technological process of the electronic control system. [0003] The process after the chemical etching of the existing machine is to wash the silicon wafer with water, and 150 liters of water is required for washing. The water volume of the pure water temporary storage tank of the antiseptic machine is controlled by the electronic control system. The electronic control system includes PLC and senso...

AI Technical Summary

Problems solved by technology

A complete anti-corrosion process takes: 5 minutes (corrosion and water washing time) + 11 minutes (water inflow time) = 16 minutes; when the operator takes out the silicon wafer and performs the next anti-corrosion process, it is necessary to reapply the pure The water temporary storage tank is filled with water. During the 11 minutes of water filling, the antiseptic machine is in a waiting state; the effective working time is not fully utilized. It can be seen that the existing electronic control system is unreasonable in program control and process flow The place

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