Coating device

A coating device and coating technology, applied in the direction of spraying devices, spraying devices, devices for coating liquid on surfaces, etc., can solve the problems of high manufacturing costs, and achieve the effects of low manufacturing cost, small size, and low-cost manufacturing

Active Publication Date: 2013-10-30
DAINIPPON SCREEN MTG CO LTD
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

However, in order to improve the positional accuracy of the substrate in the height direction, it is necessary not only to increase the number of ejection ports for ejecting gas to the area between the stage and the substrate and the number of exhaust ports for exhausting gas from the area between the stage and the substrate, but also to It is necessary to improve the processing accuracy of the surface of the table, so when increasing the area for maintaining the positional accuracy of the substrate in the height direction with high accuracy, there is a problem that the manufacturing cost of the device increases

Method used

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Embodiment Construction

[0041] Embodiments of the present invention will be described below based on the drawings. figure 1 It is a schematic plan view of the coating device according to the first embodiment of the present invention.

[0042] This coating device is a device for applying a coating liquid to the surface of the substrate 100 by moving the substrate 100 in one direction in a state where the substrate 100 is floated by supplying gas to the lower surface of the substrate 100 . This coating device has: a coating nozzle 21 which applies a coating liquid to the surface of the substrate 100 moving in one direction; On the upstream side of the substrate 100, foreign matter present on the surface of the substrate 100 is detected. In addition, air is used as the gas. However, a gas other than air, such as an inert gas such as nitrogen, may be used.

[0043] In addition, this coating apparatus has: a pair of floating tables 14, 15, which is formed with a discharge port for spraying gas to the a...

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Abstract

The invention provides a coating device which is low in manufacturing cost, and can correctly apply coating liquid and detect impurities. The coating device comprises a coating nozzle (21) for applying coating liquid onto a substrate (100), an impurity detector for detecting impurities on the surface of the substrate (100), a floating workbench (14), an impurity detection workbench (12), a coating workbench (11), a floating workbench (15), a first exhaust apparatus exhausting air from exhaust openings formed on the impurity detection workbench (12), and a second exhaust apparatus exhausting air from exhaust openings formed on the coating workbench (11).

Description

technical field [0001] The present invention relates to glass substrates for organic EL display devices, glass substrates for liquid crystal display devices, glass substrates for PDP (Plasma Display Panel: plasma displays), substrates for solar cells, substrates for electronic paper, or mask substrates for semiconductor manufacturing equipment, etc. A coating device for coating a coating liquid on a substrate. Background technique [0002] For example, when applying a coating liquid to a glass substrate for a liquid crystal display device, while conveying the substrate in one direction, the coating liquid is sprayed in a slit shape from a coating nozzle to form a coating on the surface of the glass substrate. liquid film. Here, when transporting a substrate for a precision electronic device such as a glass substrate for a liquid crystal display device, it is required to efficiently transport the substrate while preventing the substrate from being stained. [0003] On the o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05C5/00B05C11/00B05C13/02H01L21/00
CPCB05B1/00B05C5/0225B05C11/1021B05C13/00B05B15/50H01L21/0271
Inventor 高木善则
Owner DAINIPPON SCREEN MTG CO LTD
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