Apparatus and method for protecting sample of secondary ion mass spectrometer
A technology of secondary ions and protection devices, which is applied in the direction of mass spectrometers, dynamic spectrometers, and parts of particle separator tubes, and can solve problems such as instrument contamination, sample melting, and sample destruction
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[0078] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on this The embodiments in the invention, and all other embodiments obtained by persons of ordinary skill in the art without creative effort, all belong to the scope of protection of the present invention.
[0079] Such as figure 1 As shown, the embodiment of the present invention provides a sample protection device for a secondary ion mass spectrometer. The secondary ion mass spectrometer includes an electron emission device and an electron deflection device. The electron emission device includes a filament 1, an emitter 2, An anode 3 , lenses 4 , 5 , and the electron deflection device includes a first electromagnetic device 8 and a deflection plate ...
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