Electron emitting element and method for producing the same
An electron emission and component technology, applied in the manufacture of electrical components, electrode systems, and the manufacture of discharge tubes/lamps, etc., can solve the problems of dielectric film breakdown, inability to emit electrons, and reduction in the amount of electrons
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Embodiment 1
[0047] figure 1 is a schematic diagram illustrating the configuration of an embodiment of an electron emission element according to the present invention. Such as figure 1 As shown, the electron emission element 10 of this embodiment includes: an electrode substrate 1; and an electron acceleration layer 4 formed on the electrode substrate 1 and composed of insulating fine particles.
[0048] The electrode substrate 1 is an electrode that also serves as a substrate and is composed of a plate-like material formed by a conductor. Specifically, it consists of a plate-shaped material formed of stainless steel (SUS). Serving as a support for the electrodes as well as the electron emission elements, the electrode substrate 1 preferably has a certain level of mechanical strength and appropriate electrical conductivity. In addition to stainless steel (SUS), for example, substrates formed of metals such as SUS, Ti, and Cu; and substrates of semiconductors such as Si, Ge, and GaAs can...
example 1
[0096] 3 mL of ethanol as a solvent was put into the reagent bottle, and then 0.01 g of alumina fine particles 1.0CR (BAIKALOX 1.0CR manufactured by Baikowski, nominal average particle diameter: 1.0 μm according to the manufacturer) was put. Subsequently, the reagent bottle was applied to an ultrasonic disperser to prepare a dispersion liquid of alumina particles. 0.25 g of silica particles (average particle diameter: 110 nm, specific surface area: 30 m 2 / g), and the reagent bottle is applied to an ultrasonic disperser to prepare a dispersion of insulating fine particles.
[0097] Next, a 24 mm square SUS substrate was prepared as the electrode substrate 1, and a dispersion liquid of insulating fine particles was applied drop by drop on the SUS substrate by a spin coating method to form an electron acceleration layer. After the dispersion liquid of insulating fine particles was applied drop by drop to the surface of the SUS substrate, spin coating was performed at 500 rpm fo...
example 2
[0102] 2.5 mL of toluene as a solvent was put into a reagent bottle, and then 0.003 g of silica particles (average particle diameter: 8.6 μm, specific surface area: 0.8 μm) surface-treated with hexamethyldisilazane (HMDS) were put in 2 / g). Subsequently, the reagent bottle was applied to an ultrasonic disperser to prepare a dispersion liquid of silica particles. To the dispersion of silica particles was added 0.36 g of high-purity organosol PL-1-TOL (manufactured by Fuso Chemical Co., Ltd., nominal particle diameter: 10 nm to 15 nm, depending on the manufacturer, dispersed in toluene, solid concentration: 40%), and stirred to prepare a dispersion of insulating fine particles of Example 2. Using this dispersion of insulating fine particles, the electron-emitting element of Example 2 was produced in the same manner as in Example 1.
[0103] in 1×10 -8 In a vacuum under ATM, the electron emission element was measured for the electron emission current to show 5.0×10 when the vo...
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