A parallel piezoelectric six-dimensional force sensor

Abstract

The invention discloses a parallel piezoelectric six-dimensional large force sensor, which is characterized by comprising an upper cover, force-sensitive elements, wires, a sealing ring, a pretightening screw, a lower cover, screw holes and a hollow screw, wherein the lower part of the upper cover is provided with a circular upper cover groove; the upper part of the lower cover is provided with a circular lower cover bulge; the upper surface of the lower cover bulge is provided with four groups of bosses which are uniformly distributed on the same circle; each boss is provided with a force-sensitive element; the upper cover is matched with the lower cover through the upper cover groove and the lower cover bulge; the upper surface of each force-sensitive element is contacted with the surface of the groove; the side wall of the upper cover is provided with the hollow screw; the upper cover, the force-sensitive elements and the lower cover are fixed to form a whole by the pretightening screw through a through hole; and the upper surface of the upper cover and the lower surface of the lower cover are provided with the screw holes.

Description

[0001] technical field [0002] The invention belongs to the technical field of sensors and measurement and control thereof, in particular to a piezoelectric six-dimensional force sensor based on a parallel structure, which can be used to measure three-dimensional force components and moment components in space. Background technique [0003] Accurate and efficient manufacturing of large components in the fields of nuclear power, shipbuilding, chemical industry, and national defense urgently requires heavy-duty operating equipment. Heavy-duty manufacturing equipment is the basic equipment in the manufacturing industry chain, the embodiment of the country's extreme manufacturing capacity and manufacturing level, and an important guarantee for the national economy and national defense security. The heavy-duty operation equipment is a giant industrial robot operating under extreme load conditions, which can realize dexterous multi-dimensional force-position operation. In the man...

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Problems solved by technology

Patent CN2233081Y discloses an integrated six-dimensional force / torque sensor combined with a disc structure and a cylinder structure. Patent CN2066134U discloses a cylindrical upper and lower structure six-dimensional force / torque sensor. Patents CN101329208A and CN101329207A Two kinds of six-dimensional force sensors with double-layer upper and lower structures are disclosed, both of which are Stewart-type parallel structure assemblies. Some have large size, some have low stiffness, some have low strain sensitivity, and some have difficulty in decoupling. Processing this type of six-dimensional force sensor requires high-precision processing equipment, which is difficult to process. In addition, due to the presence of Coupling phenomenon requires complex decoupling operations on the output signal to obtain the output result, and this type of measurement range is small, mostly used for small force value measurement, and cannot meet the requirements of dynamic measurement

[0004] Patent CN00119096.2 discloses a thick film force sensitive resistor sintered on the diaphragm by using thick film technology, and realizes six-dimensional force sensing by decoupling Signal measurement method, although this method overcomes most of the shortcomings of the traditional six-dimensional force sensor pasting strain gauges, but there are still coupling phenomena in all directions, and further decoupling operations are still required for the output signal of the force sensitive resistor to get the output

[0005] Patent CN101013054 discloses a differential piezoelectric six-dimensional force sensor and CN101750173A discloses a piezoelectric six-dimensional force sensor. Eight or two multi-dimensional piezoelectric force sensors are installed on it, and the external force information is directly applied to each sensor through the force transmission mechanism, which avoids the influence of the elastic body on the sensor, has no inter-dimensional coupling, and the process is simple, but this type of six-dimensional force The sensor has high requirements for the installation accuracy of each sensor, and also requires high consistency for the same type of sensor

[0006] Patent CN101149300 discloses a piezoelectric six-dimensional force sensor, which can realize large-range six-dimensional force dynamic measurement. It adopts Stewart structure and has difficulty in decoupling The problem is that the volume is large and the installation requires high precision

Patent CN101149299 discloses a three-dimensional force integrally assembled six-dimensional force sensor. The structural sensor is easy to adjust and install, and can measure six-dimensional force in space, but the structure is complicated and decoupling is difficult.

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