Pirani vacuum gauge of carbon nanotube and vacuum degree detection method thereof

Abstract

The invention discloses a Pirani vacuum gauge of a carbon nanotube and a vacuum degree detection method thereof, and the vacuum gauge mainly comprises a substrate, a pair of electrodes arranged oppositely and the carbon nanotube, wherein the pair of the electrodes is manufactured on the substrate and the carbon nanotube is carried between the pair of electrodes; the pair of the electrodes is usedfor adding constant current or voltage to the carbon nanotube for heating, because gases in different vacuum degrees have different heat conduction properties, the carbon nanotubes correspondingly have different constant temperatures; furthermore, the resistance of the carbon nanotube changes along with the temperature, and the vacuum degree can be measured by measuring the resistance of the carbon nanotube. The Pirani vacuum gauge of the carbon nanotube is simple in structure, small in volume and stable in performances, and the adopted carbon nanotube has higher resistance temperature coefficient and electrical conductivity, thereby realizing fast response, a wide range of gas pressure measurement, high sensitivity and low power consumption. Furthermore, the manufacturing process of the Pirani vacuum gauge of the carbon nanotube is simple, the cost is low, the finished product ratio is high and the reliability is high.

Description

Technical field [0001] The invention belongs to the technical field of microelectronics, and relates to a carbon nanotube Pirani vacuum gauge in a nanoelectromechanical system and a method for detecting its vacuum degree. Specifically, it relates to a single carbon nanotube, multiple carbon nanotubes or Carbon nanotube Pirani vacuum gauge for carbon nanotube bundles. Background technique [0002] With the development of MEMS technology, more and more MEMS devices require a vacuum environment to improve device performance and ensure that the device can work normally for a longer time. Such as some electronic, mechanical and optical sensors, including micro-resonators, micro-gyros, thin-film pressure sensors, radio frequency MEMS components, vacuum field emitters, and some optical MEMS devices. The degree of vacuum in the packaging cavity determines to a large extent the final performance, reliability and life of the device. Therefore, the monitoring of the degree of vacuum in the...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the shortcomings of the Pirani vacuum gauge in the prior art, such as large volume, small measurement range, and low sensitivity, the present invention provides a Pirani vacuum gauge composed of carbon nanotubes, which has the advantages of small volume, simple structure, and easy Realization, low working temperature, wide measurement range, high sensitivity, etc., and can work under a variety of ambient gases

Images