Aluminum ribbon for ultrasonic bonding

A technology of ultrasonic welding and aluminum strip, applied in transportation and packaging, electric solid devices, semiconductor devices, etc., can solve problems such as poor connection and unmaintainable bonding conditions

Inactive Publication Date: 2014-05-07
TANAKA DENSHI KOGYO KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0021] However, in the case of aluminum strips used to connect semiconductor devices by ultrasonic welding, although the joining conditions using ultrasonic waves are different between the front surface and the rear surface, ultrasonic welding is automatically performed at a rate of several per second, so it is necessary to Even tens of thousands of times must be joined under the same conditions
[0022] In this way, in the conventional method of mechanically changing the outer shape of the aluminum strip, although the effect can be exerted initially, when the ultrasonic welding is continued tens of thousands of times, the joining conditions will not be maintained, and connection failures will frequently occur.

Method used

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  • Aluminum ribbon for ultrasonic bonding

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Experimental program
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Effect test

Embodiment

[0078] Embodiments of the present invention are described below.

[0079] Starting from the alloy composition shown in Table 1 (aluminum (Al) with a purity of 99.999% by mass was used as the raw material, but the same result was obtained for aluminum (Al) with a purity of 99.99% by mass) and a welding wire with a specified wire diameter. Materials, Examples 1-20 and Comparative Examples 1-5 shown in Table 1 were prepared.

[0080] Next, using a rolling device (not shown), these aluminum strips are subjected to a one-stage hot rolling process to make the surface roughness R Z = 0.5 micrometers (μm), the average grain size was 10 micrometers (μm), the thickness was 120 micrometers (μm), and the aspect ratio of width / thickness was 11. Next, these aluminum strips were washed twice with hot pure water at 80°C. Subsequently, at room temperature, with the linear speed of 80 m / min, the aluminum strip of regulation is in the 5000 times pure water dilution solution (A liquid) of non-i...

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Abstract

[Issues to be Solved] To provide an aluminum ribbon for ultrasonic bonding, is able to realize the high bonding strength and is able to maintain defined level of bonding strength, during several ten thousand bonding cycles. [Means to be Solved] An aluminum ribbon for ultrasonic bonding is consisted aluminum metal or aluminum based alloy, the purity of aluminum is more than 99.99 wt %, and total amount of organic carbon non-ionic surfactant less than 500 molecular weight vaporized and adhered is 100-1,000 μg / m2 on the mirror finished bright surface of aluminum ribbon.

Description

technical field [0001] The present invention relates to an aluminum strip used for connecting semiconductor element electrodes and lead portions on the substrate side by ultrasonic welding in electronic components and semiconductor packages. Background technique [0002] In the manufacture of semiconductor devices, it is widely used to electrically connect the connection electrodes (pads) provided on the semiconductor chip and the external terminals (leads) provided in the semiconductor package, and use strip-shaped aluminum conductors with a nearly rectangular cross section. Body (hereinafter referred to as "strip") welding method. This welding method utilizes a welding method of aluminum conductive wires, in which a cemented carbide tool is pressed against an aluminum strip overlaid on an electrode or a lead, and the load and the energy of ultrasonic vibration are applied to perform bonding. [0003] The effect of applying ultrasonic waves is as follows, through the expan...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/60H01L21/607
CPCH01L2924/01049H01L2924/01204H01L2924/01027H01L2924/01058H01L24/45H01L2924/0106H01L2924/01015H01L2224/45124H01L24/43H01L2924/01004H01L2924/01006H01L2924/01028H01L2924/01079H01L2224/85205H01L2924/01038H01L2924/01014H01L2924/01083H01L2924/01005H01L2924/01082H01L2924/01057H01L2224/43H01L2924/01013H01L2224/45144C22C21/00H01L2924/01003H01L2224/45014H01L2924/01029H01L2924/01012H01L2924/01019H01L2924/01009H01L2924/01033H01L2924/00014H01L2924/0102H01L2224/45015H01L2224/43848Y10T428/31678H01L2924/01205H01L2924/00012H01L2924/00H01L2924/013H01L2924/00013H01L2924/01039H01L2224/48H01L2924/00015H01L2924/206
Inventor 三上道孝菊地照夫中岛伸一郎平田勇一中村政晴木村启裕
Owner TANAKA DENSHI KOGYO KK
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