Unlock instant, AI-driven research and patent intelligence for your innovation.

Manufacturing method of silver alloy sputtering target

A manufacturing method and sputtering target technology, which is applied in the field of silver alloy sputtering target manufacturing, can solve problems such as substrate adhesion degradation, high cost, and silver grain growth

Active Publication Date: 2012-09-05
广州市尤特新材料有限公司
View PDF1 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, on the one hand, the cost of the pure silver sputtering target is high; The growth of silver crystal grains or the aggregation of silver atoms will cause problems such as deterioration of conductivity and reflectivity, or deterioration of adhesion to the substrate.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Manufacturing method of silver alloy sputtering target

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] A method for manufacturing a silver alloy sputtering target, comprising the steps of:

[0032] Step 1. Ingredients: Calculate the input weight of each alloy component according to the percentage of alloy composition according to the capacity of the furnace, and calculate the weight of each component according to the percentage of mass; Zr is 0.3%, Re is 0.02%, Ag is 0.05%, and the balance is Al ;

[0033] Step 2. Feeding: feeding sequence Al, AlZr alloy, AlAg alloy, AlRe alloy;

[0034] Step 3. Melting: The melting temperature is 680°C for Al, 700°C for AlZr alloy, 740°C for AlAg alloy, and 700°C for AlRe alloy. The melting time is: 10 minutes for Al, 10 minutes for AlZr alloy, 15 minutes for AlAg alloy, and 5 minutes for AlRe alloy ;

[0035] Step 4. Refining: send the refining agent to the bottom of the furnace through argon gas through a pure graphite tube, fully stir, degas, remove slag, and let it stand for 10 minutes;

[0036] Step 5, casting: use cast iron or ...

Embodiment 2

[0039] A method for manufacturing a silver alloy sputtering target, comprising the steps of:

[0040] Step 1. Ingredients: Calculate the input weight of each alloy component according to the percentage of alloy composition according to the capacity of the furnace, and calculate the weight of each component according to the percentage of mass; Zr is 2.5%, Re is 1%, Ag is 0.5%, and the balance is Al ;

[0041] Step 2. Feeding: feeding sequence Al, AlZr alloy, AlAg alloy, AlRe alloy;

[0042] Step 3. Melting: The melting temperature is 710°C for Al, 740°C for AlZr alloy, 740°C for AlAg alloy, and 730°C for AlRe alloy. The melting time is: 60 minutes for Al, 15 minutes for AlZr alloy, 20 minutes for AlAg alloy, and 10 minutes for AlRe alloy;

[0043] Step 4. Refining: send the refining agent to the bottom of the furnace through argon gas through a pure graphite tube, fully stir, degas, remove slag, and let it stand for 10 minutes;

[0044] Step 5, casting: use cast iron or cast ...

Embodiment 3

[0047] A method for manufacturing a silver alloy sputtering target, comprising the steps of:

[0048] Step 1. Ingredients: Calculate the input weight of each alloy component according to the percentage of alloy composition according to the capacity of the furnace, and calculate the weight of each component according to the percentage of mass; Zr is 2.0%, Re is 0.06%, Ag is 0.10%, and the balance is Al ;

[0049] Step 2. Feeding: feeding sequence Al, AlZr alloy, AlAg alloy, AlRe alloy;

[0050] Step 3. Melting: The melting temperature is 690°C for Al, 720°C for AlZr alloy, 740°C for AlAg alloy, and 720°C for AlRe alloy. The melting time is: 30 minutes for Al, 15 minutes for AlZr alloy, 15 minutes for AlAg alloy, and 8 minutes for AlRe alloy ;

[0051] Step 4. Refining: Send the refining agent to the bottom of the furnace through argon gas through a pure graphite tube, fully stir, degas, remove slag, and let it stand for 10 minutes;

[0052] Step five, casting: use cast iron ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a manufacturing method of a silver alloy sputtering target, which comprises the steps of: strictly controlling a material distribution proportion and a feeding sequence, and strictly controlling the smelting temperature and the smelting duration of the alloy components in the smelting and refining processes to obtain an alloy target material capable of replacing a silver target material in the prior art and capable of overcoming the technical defects of the silver target material, namely, the obtained alloy sputtering target is entitled with excellent performance by distributing different smelting temperatures and smelting durations on alloys with different components.

Description

technical field [0001] The invention relates to a manufacturing method of a silver alloy sputtering target. Background technique [0002] The thin film formed by pure silver sputtering target has high reflectivity and low resistance characteristics, so it is suitable for reflective film of optical recording medium, electrode and reflective film of reflective liquid crystal display, etc. [0003] However, on the one hand, the cost of pure silver sputtering targets is high; Phenomena such as growth of silver crystal grains or aggregation of silver atoms occur, thereby causing problems such as deterioration of electrical conductivity, decrease of reflectivity, and deterioration of adhesion to the substrate. Therefore, recently, many attempts have been made to improve the corrosion resistance of pure silver by adding alloy elements while maintaining the original high reflectance of pure silver. In addition, while improving such a thin film, the target used for forming the silv...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C22C21/00C22C1/02C22C1/06
Inventor 肖世文马敬山黄德燕
Owner 广州市尤特新材料有限公司