Semiconductor processing device and gas spray head cooling plate thereof
A gas shower head and cooling plate technology, which is applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problem of high distribution density of gas outlet channels, replacement or maintenance of some components, and gas shower head structure Complicated and other problems, achieve good cooling effect, realize re-repair, and eliminate air hole leakage
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[0043] The invention provides a gas shower head cooling plate, which can be installed on the gas shower head to cool the gas. Once the gas shower head or the gas shower head cooling plate is damaged, it can be replaced or repaired locally. The whole device will not be scrapped.
[0044] The cooling plate of the gas shower head in the present invention includes a cover plate and a base body. The cover plate and the base body form a closed space. By arranging a plurality of cooling liquid separation devices distributed at intervals in the base body, a cooling space suitable for passing the cooling liquid can be formed. The cooling liquid separation device is provided with a through hole suitable for passing the gas, so as to realize the cooling function of the gas on the cooling plate of the gas shower head.
[0045]The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in...
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