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High aspect ratio ultramicro tungsten electrode array and preparation method thereof

A high aspect ratio, tungsten electrode technology, applied in the field of micro-sensing, can solve problems such as difficulty in mass production

Inactive Publication Date: 2012-02-15
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the use of hot pressing technology and the repeated use of mask patterns and molds, the further improvement of the electrode aspect ratio is limited, and it is difficult to achieve mass production

Method used

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  • High aspect ratio ultramicro tungsten electrode array and preparation method thereof
  • High aspect ratio ultramicro tungsten electrode array and preparation method thereof
  • High aspect ratio ultramicro tungsten electrode array and preparation method thereof

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Embodiment Construction

[0029] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0030] 1) Take 5×2 copper splints and tungsten wires with a diameter of 50 μm and clean them with absolute ethanol;

[0031] The size of the copper splint is (10.00, 10.15, 10.30, 10.45, 10.60) mm × 10mm × 2mm;

[0032] 2) Referring to Figure 2, use the wire cutting process to symmetrically process 6 copper plates with a width of 60 μm and a depth of The arc groove is 80μm, the distance between adjacent arc grooves is 150μm, the process parameters: no-load voltage 70-90V, peak current <4.8A, pulse width 2-6μs, pulse interval <3μs, wire speed 1m / min, the feed rate is 10mm / min, and the coolant is deionized water;

[0033] 3) Referring to Figure 3, 6 arc grooves with a width of 60 μm and a depth of 6 mm are successively processed from the 15.00 mm sides of two 15mm×10mm×2mm copper plates by wire cutting process, and the distance between adjace...

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Abstract

A high aspect ratio ultramicro tungsten electrode array and a preparation method thereof. The preparation method comprises steps of: first manufacturing copper splints, front baffles, side baffles and a pedestal; fixing the front baffles, the copper splints and the pedestal together; threading tungsten filaments through the front baffles respectively, placing two ends of each tungsten filament in grooves of the copper splints, and binding and fixing the tungsten filaments in the grooves at backs of the copper splints; fixing the copper splints respectively and repeatedly to prepare an m*n tungsten filament array; fixing the side baffles and the pedestal to form a cavity with the front baffles; casting epoxy resin into the cavity, solidifying and trimming the tungsten filaments; and dismounting the side baffles, the copper splints, the front baffles and the pedestal successively to obtain the high aspect ratio m*n ultramicro tungsten electrode array. Compared with other tungsten electrode arrays prepared by other methods, the ultramicro tungsten electrode array prepared by the method of the invention has characteristics of high aspect ratio, high precision, adjustable array, low costs and suitability for batch production.

Description

technical field [0001] The invention belongs to the field of micro-sensing technology, and is mainly used in biology, medicine, electrochemistry and environmental monitoring, etc., and particularly relates to a high-aspect-ratio ultra-micro tungsten electrode array for information recording and electrical stimulation of micro-regions such as cells and nerves and its preparation method. Background technique [0002] The high aspect ratio ultra-micro tungsten electrode array and its preparation method belong to the field of micro-sensing detection technology, and are mainly used in biology, medicine, electrochemical and environmental monitoring, etc., especially for micro-area analysis, electrical stimulation of brain cells, and treatment of Parkinson's disease, restoration of hearing and vision, etc. This type of electrode array can realize the real-time detection of multiple target molecules, and at the same time, the specificity and sensitivity of the detection are greatly...

Claims

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Application Information

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IPC IPC(8): G01N27/30
Inventor 景蔚萱周贵庭蒋庄德樊哲牛玲玲
Owner XI AN JIAOTONG UNIV
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