Surface-treatment method for components of mechanical booster pumps, turbomolecular pumps, or dry pumps, as well as mechanical booster pump, turbomolecular pump, or dry pump treated with said surface-treatment method
A technology of turbomolecular pump and mechanical booster pump, which is applied to components of pumping devices for elastic fluid, rotary piston type/oscillating piston type pump components, pump components, etc., can solve problems such as inability to use, and achieve The effect of a small amount of outgassing, excellent gas corrosion resistance, and excellent exhaust gas corrosion resistance
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Embodiment 1
[0040] Next, examples of the present invention will be described together with comparative examples.
[0041]At room temperature, put a disc-shaped aluminum alloy casting (AC4A) material with a diameter of 40mm and a length of 3mm into a solution of potassium hydroxide 1g / L, sodium metasilicate 2g / L and trisodium phosphate 3g / L (0.1% hydroxide Potassium, 0.1% sodium metasilicate, 0.3% trisodium phosphate) electrolyte, micro-arc oxidation treatment is carried out in the constant current mode of 50Hz AC and DC overlapping waveforms, and an oxide film with a film thickness of about 15 μm is grown on the surface of the component.
Embodiment 2
[0043] to constitute figure 1 The structure of the dry pump (maximum exhaust velocity of 1.72 × 10 -2 m 3 / s (50Hz)) aluminum alloy castings made of rotor 8 ~ 12, rotor chamber 4, casing 1, air inlet 2 and the surface of the exhaust port 3, the same as in Example 1 to carry out micro-arc oxidation treatment, in An oxide film with a thickness of about 12 μm grows on the surface of the component. In addition, the parts that have not been processed, that is, the rotor shaft portion 6 and the positioning pin portion of the iron core, are shielded with a silicon sealing material and a silicone rubber plug, respectively.
[0044] After the above processing is completed, a dry pump is assembled from each component.
comparative test 1
[0050] The results of measuring the gas emission characteristics of the components of Example 1 and Comparative Example 1 at room temperature are shown in image 3 of the graph. The vertical axis of the graph represents the amount of gas released per unit area (Pa·m·s -1 ), and the horizontal axis represents time (hours).
[0051] From this graph, it can be seen that the amount of gas released per unit area in Example 1 is about 1 / 100 of that in Comparative Example 1.
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Abstract
Description
Claims
Application Information
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