Optical system for measuring and regulating center deviation of optics lens at high precision

An optical lens and optical system technology, applied in the field of optical systems, can solve problems such as error accumulation and measurement accuracy influence, and achieve the effects of improving measurement adjustment accuracy, simplifying measurement process, and expanding measurement adjustment range.

Inactive Publication Date: 2012-03-21
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
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  • Application Information

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Problems solved by technology

The main problem with this optical system is that the measurement accuracy of the second surface will be

Method used

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  • Optical system for measuring and regulating center deviation of optics lens at high precision
  • Optical system for measuring and regulating center deviation of optics lens at high precision
  • Optical system for measuring and regulating center deviation of optics lens at high precision

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Embodiment Construction

[0017] The invention presses figure 2 The optical system shown is implemented. The optical system includes a light source 6 using a He-Ne frequency stabilized laser; a focusing lens 7 using a short focal length lens; a pinhole 8 located at the image side focus of the focusing mirror 7; a collimating lens 9 using A lens with very small spherical aberration, and the object focus of the collimating lens 9 is at the pinhole 8. The half-wave plate 10, which uses a half-wave plate corresponding to the wavelength of the He-Ne laser, is fixed on a rotating frame that can rotate along the optical axis Top; Polarization beam splitter 11, using cubic polarization beam splitting prism; the first quarter wave plate 12, using a quarter wave plate corresponding to the wavelength of the He-Ne laser, its fast axis placement angle to ensure two linear polarization The second pass changes the polarization direction by 90°; the first plane mirror 13 is located below the first quarter-wave plate 1...

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Abstract

The invention discloses an optical system for measuring and regulating the center deviation of an optics lens at high precision, which relates to the optical system for measuring and regulating the center deviation of a lens in the technical field of optical inspection measurement. The invention aims to solve the technical problem of providing the optical system for measuring and regulating the center deviation of the optics lens at the high precision. The optical system comprises a light source, a focus lens, a pinhole, a collimating lens, a half wave plate, a polarization beam splitter, two1/4 wave plates, three planar mirrors, a plane swerving lens, two convergent lenses, two beam splitters, two occluders, a measured lens, two plane array receivers, a lens and a polarization analyzer.All above devices are combined to form a reference light path and a measurement light path, and carrying out interferometry to the center deviation of the measured lens through the measurement light reflected by the measured lens and the reference light. According to the optical system, measurement precision is improved, the measurement range is expanded, and a measurement process is simplified.

Description

Technical field [0001] The invention belongs to an optical system for lens center deviation measurement and adjustment involved in the technical field of optical inspection and measurement, and is mainly used for on-site high-precision detection and adjustment of lens center deviation. Background technique [0002] In recent years, with the development of the semiconductor industry, the requirements of projection lithography technology for high imaging quality of projection exposure lenses have become higher and higher. Among them, the projection objective is an imaging system composed of multiple lenses. Due to the center deviation, the coaxiality of the optical system is destroyed, resulting in astigmatism and distortion asymmetry of the imaging, thereby reducing the imaging quality. The existence of center deviation will also directly affect key parameters such as system resolution and operating distance. [0003] At present, the center deviation of the measuring lens is mainly...

Claims

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Application Information

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IPC IPC(8): G02B27/62G02B27/28G01M11/02
Inventor 方超向阳
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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