Accurate multi-valued memory cell programming method
A programming method and multi-value storage technology, applied in the field of precise programming, local capture type memory to realize multi-value storage, can solve the degradation of memory cell tolerance and retention characteristics, program/erase position mismatch, short channel The memory cell aggravates the second bit effect and other problems, and achieves the effect of reducing the second bit effect, accurate programming, and small spatial distribution range.
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[0032] Taking the local trap type SONOS multi-value memory cell as an example, the programming operation of each state of the above-mentioned multi-value cell can adopt the substrate positive bias to suppress the second-generation hot electron injection (CHE) programming method, or use the pulse-excited The programming method of Substrate Hot Electron Injection (PASHEI) realizes the programming of charge localization. Figure 4 It is a schematic diagram of the programming principle of realizing different programming states by using the CHE method of substrate positive bias. The structure of the SONOS memory cell is: on a P-type semiconductor substrate 10 N-type semiconductor regions are provided on both sides above to form the source 11 and drain 12 , directly above the substrate, between the source and drain is the channel region. Tunneling layers are arranged directly above the channel region 16 , charge storage layer 15 and barrier 14 , above the barrier is the gate ...
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