The application provides a kind of integrated capacitive and resistive
thin film sensor and its preparation and use method, including integrated resistance sensitive unit and
capacitance sensitive unit, resistance sensitive unit includes upper and lower resistance sensitive layer and
electrode lead-out part, the upper resistance sensitive unit and the lower resistance sensitive unit both include flexible substrate and resistance sensitive layer, and two resistance sensitive
layers are respectively arranged on the front surface of two flexible substrates and contact each other;
Capacitance sensitive unit includes upper and lower
capacitor plate and
dielectric layer and insulating layer between them;The upper and lower
capacitor plate is prepared with the
electrode lead-out part of resistance sensitive unit using the same
sputtering process;And the lower
capacitor plate and its
electrode are spaced apart from the upper capacitor plate through insulating layer and
dielectric layer.The structure is small in size, high in integration, compact in structure, simplified in process, reduced in cost, and realizes that the resistance loop of resistance sensitive unit and the
capacitance loop of
capacitance sensitive unit are completely separated and electrically isolated.