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664 results about "Multiple pulse" patented technology

Method of multiple pulse laser annealing to activate ultra-shallow junctions

A method for forming a highly activated ultra shallow ion implanted semiconductive elements for use in sub-tenth micron MOSFET technology is described. A key feature of the method is the ability to activate the implanted impurity to a highly active state without permitting the dopant to diffuse further to deepen the junction. A selected single crystalline silicon active region is first amorphized by implanting a heavy ion such as silicon or germanium. A semiconductive impurity for example boron is then implanted and activated by pulsed laser annealing whereby the pulse fluence, frequency, and duration are chosen to maintain the amorphized region just below it's melting temperature. It is found that just below the melting temperature there is sufficient local ion mobility to secure the dopant into active positions within the silicon matrix to achieve a high degree of activation with essentially no change in concentration profile. The selection of the proper laser annealing parameters is optimized by observation of the reduction of sheet resistance and concentration profile as measured on a test site. Application of the method is applied to forming a MOS FET and a CMOS device. The additional processing steps required by the invention are applied simultaneously to both n-channel and p-channel devices of the CMOS device pair.
Owner:CHARTERED SEMICONDUCTOR MANUFACTURING

Radar detection method based on generalized keystone transformation and non-coherent accumulation

The invention discloses a radar detection method based on generalized keystone transformation and non-coherent accumulation, wherein the method mainly solves the detection problem of a high speed and highly accelerated target in a strong Gaussian white noise background. The method is implemented by the following steps: (1) generating radar target multiple-pulse echoes with Gaussian white noise added, and performing frequency domain pulse compression; (2) correcting range curvature of the pulse-compressed echoes by using the generalized keystone transformation; (3) performing fuzzy compensation on the curvature-corrected echoes by using a fuzzy factor; (4) performing non-coherent accumulation on the fuzzy-compensated echoes, and performing velocity compensation and slow time dimensional quadratic term compensation on the echoes by using a target velocity obtained in the non-coherent accumulation; (5) performing coherent accumulation on the slow time dimensional quadratic term compensated echoes to obtain the target to be detected. The method provided in the invention can eliminate effects of the range curvature and migration of the echoes on energy accumulation, can reduce computation of velocity search, and can be used in the detection of the target in the strong Gaussian white noise background.
Owner:XIDIAN UNIV

Broadband radar detection method based on weighted sequence statistics and multiple-pulse coherence accumulation

The invention discloses a broadband radar detection method based on weighted sequence statistics and multiple-pulse coherence accumulation. The method can be used to mainly solve a detection problem under an unknown scene of a high-speed moving target space distribution state. The method is characterize by: generating broadband radar target multipulse echo with clutter and performing FFT to the echo along a distance domain; calculating a clutter normalization covariance matrix; performing prewhitening processing and chirp-z transformation to distance frequency domain data; estimating a target speed and performing phase-coherent accumulation; performing IFFT to the pulse which is performed with the phase-coherent accumulation; calculating each distance unit square envelope of the pulse and performing descending order; carrying out weighted processing to the data after being performed with the descending order; initializing a counter; calculating the adaptive matched filter energy accumulation of a counting distance unit; detecting whether the target exists according to a threshold. By using the method of the invention, the clutter can be effectively inhibited. Migration through resolution cell of the echo can be corrected. Through descending-order weighted processing, the radar can rapidly detect the target under the unknown target space distribution state.
Owner:XIDIAN UNIV
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