72-degree five-port micro-electromechanical microwave power sensor and manufacturing method thereof
A technology of micro-electronic machinery and microwave power, which is applied in electric power measurement by thermal method, micro-structure technology, micro-structure device, etc. It can solve the problems of large volume, inability to realize microwave circuit integration, etc., and achieve high sensitivity and good linearity. , the effect of low loss
Inactive Publication Date: 2013-08-07
SOUTHEAST UNIV
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Problems solved by technology
The traditional power meter uses a microwave power sensor in the form of a waveguide, usually bismuth-antimony as a thermocouple, and a coaxial cable as a transmission line. The main disadvantage is that it is bulky and cannot be integrated with a microwave circuit.
Method used
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Embodiment Construction
[0040] The specific implementation scheme of the five-port microelectromechanical microwave power sensor with an angle of 72o invented in this paper is as follows:
[0041] On the gallium arsenide substrate 15, five CPWs 6, ten terminal matching resistors 7, one thermopile composed of ten thermocouples 8 and five pairs of thermocouples 8, two output welding blocks 12, one The metal heat sink 11 and the connecting wire 14 form a MEMS substrate film structure 12 under the substrate 15:
[0042] The CPW 6 is used to realize the transmission of the microwave signal, and the circuit connection between the test instrument and the terminal matching resistor 7 . Each CPW 6 consists of a CPW signal line and two ground lines.
[0043] The terminal matching resistor 7 is connected to the output terminal of the CPW 6, completely absorbs the microwave power transmitted by the input terminals 1, 2, 3, 4 and 5 of the CPW 6, and converts it into heat.
[0044] The thermopile is composed of ...
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Abstract
The invention discloses a 72-degree five-port micro-electromechanical microwave power sensor, which has the advantages of the conventional thermoelectric microwave power sensor such as low loss, high sensitivity and high linearity and has the advantages of capability of realizing the measurement of five-port microwave power, high integrity and compatibility with a gallium arsenide monolithic microwave integrated circuit. In the sensor, a gallium arsenide substrate is provided with five CPW (Circular Polargation Wave) input ends which are used for transmitting microwave signals and are arranged symmetrically at angles of 72 degrees; each CPW output end is connected two terminal matching resistors; a thermocouple is arranged close to each terminal matching resistor; five pairs of thermocouples are symmetrically arranged and are connected in series to form a thermoelectric pile; the five pairs of thermocouples are arranged at angles of 72 degrees; a metal radiating rib is surrounded by the cold end of the thermoelectric pile; and an MEMS (Micro Electro Mechanical System) substrate membrane structure is positioned below the terminal matching resistor and thermoelectric pile.
Description
technical field [0001] The invention provides a five-port micro-electro-mechanical microwave power sensor with an angle of 72o and a preparation method thereof, belonging to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] In microwave technology research, microwave power is an important parameter to characterize microwave signal characteristics. The traditional power meter uses a microwave power sensor in the form of a waveguide, usually bismuth-antimony as a thermocouple, and a coaxial cable as a transmission line. The main disadvantage is that it is bulky and cannot be integrated with a microwave circuit. At present, the most common microwave power sensor is a microwave power sensor based on the principle of thermoelectric conversion. Its working principle is that the input microwave power to be measured is introduced from one end of the coplanar waveguide transmission line, and the terminal matching resistor connected to the ...
Claims
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IPC IPC(8): G01R21/02B81C1/00
Inventor 廖小平张志强
Owner SOUTHEAST UNIV