RFID high-frequency chip four-channel test device and method

A test device and four-channel technology, applied in single semiconductor device testing, semiconductor/solid-state device testing/measurement, instruments, etc., can solve problems such as low efficiency and slow speed, achieve high efficiency, reduce signal interference, and shorten test time Effect

CN102401873AInactive Publication Date: 2012-04-04JIANGSU KILOWAY ELECTRONICS
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2012-04-04
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses an RFID (Radio Frequency Identification Device) high-frequency chip four-channel test device and a method, wherein the device at least comprises a probe station, an upper computer and an RFID reader; the probe station comprises a moveable platform and a probe card; the movable platform bears a wafer to be tested and is used for providing directional movement in the directions of X-axis, Y-axis and Z-axis; a plurality of RFID high-frequency chips to be tested are regularly distributed on the wafer; a probe on the probe card is contacted with the chips during the test; the upper computer is connected with the probe station and controls the movement of the movable platform; the probe card is provided with eight probes; every two probes are in one group and are arranged in parallel; each chip to be tested corresponds to one group of probes; the upper computer is connected with the RFID reader and controls the RFID reader to send a test signal; and the signal is returned according to the chip to be tested so as to judge the test result and store the test result in a database. Due to the RFID high-frequency chip four-channel test device and the method, the test yield and test speed of products are improved, and the test cost is saved.
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Description

technical field

[0001] The invention relates to a testing device and method, in particular to a four-channel testing device and method for an RFID high-frequency chip. Background technique

[0002] RFID (Radio Frequency Identification, radio frequency identification) is a non-contact automatic identification technology realized by radio frequency communication. RFID tags have the characteristics of small size, large capacity, long life, and reusability. Visual recognition, mobile recognition, multi-target recognition, positioning and long-term tracking management, a typical application system based on RFID technology consists of three parts: RFID card reader, RFID electronic tag, and RFID application software. Non-contact data transmission between electronic tags achieves the purpose of target identification and data exchange.

[0003] In the manufacturing process of the semiconductor industry, it can be divided into several major steps: IC design, wafer manufacturing, wafe...

Examples

Embodiment Construction

[0030] The present invention will be further described below in combination with schematic diagrams and specific operation examples.

[0031] Please see figure 1 and figure 2 , the RFID high-frequency chip four-channel test device of the present invention mainly includes a probe station and a host computer 7, wherein the probe station includes a motion platform 1 and a probe card 6, and the motion platform 1 carries the wafer 2 to be tested for Provide directional movement in the X-Y-Z three-axis direction, refer to the arrow mark for the X-Y-Z three-axis direction, and the upper computer 7 is connected to the probe station through the GPIB interface to control the movement of the motion platform 1. There are many pieces of RFID high-frequency chips 3 to be tested regularly distributed on the wafer 2 to be tested. Every four chips form a group and are arranged in pairs. There are eight probes 4 on the probe card 6. Every two pieces form a group and They are arranged in para...