RFID high-frequency chip four-channel test device and method

Abstract

The invention discloses an RFID (Radio Frequency Identification Device) high-frequency chip four-channel test device and a method, wherein the device at least comprises a probe station, an upper computer and an RFID reader; the probe station comprises a moveable platform and a probe card; the movable platform bears a wafer to be tested and is used for providing directional movement in the directions of X-axis, Y-axis and Z-axis; a plurality of RFID high-frequency chips to be tested are regularly distributed on the wafer; a probe on the probe card is contacted with the chips during the test; the upper computer is connected with the probe station and controls the movement of the movable platform; the probe card is provided with eight probes; every two probes are in one group and are arranged in parallel; each chip to be tested corresponds to one group of probes; the upper computer is connected with the RFID reader and controls the RFID reader to send a test signal; and the signal is returned according to the chip to be tested so as to judge the test result and store the test result in a database. Due to the RFID high-frequency chip four-channel test device and the method, the test yield and test speed of products are improved, and the test cost is saved.

Description

technical field [0001] The invention relates to a testing device and method, in particular to a four-channel testing device and method for an RFID high-frequency chip. Background technique [0002] RFID (Radio Frequency Identification, radio frequency identification) is a non-contact automatic identification technology realized by radio frequency communication. RFID tags have the characteristics of small size, large capacity, long life, and reusability. Visual recognition, mobile recognition, multi-target recognition, positioning and long-term tracking management, a typical application system based on RFID technology consists of three parts: RFID card reader, RFID electronic tag, and RFID application software. Non-contact data transmission between electronic tags achieves the purpose of target identification and data exchange. [0003] In the manufacturing process of the semiconductor industry, it can be divided into several major steps: IC design, wafer manufacturing, wafe...

AI Technical Summary

Problems solved by technology

At present, the multi-channel test technology controlled by the testing machine is widely used. It uses the probe station as the precise positioning unit, and the internal relay is controlled by the testing machine to switch to different semiconductor chips to be tested. For example, a wafer disclosed in Chinese patent CN101738573A Testing device and its testing method, the fully automatic wafer testing method disclosed in Chinese patent CN101261306A and the equipment for realizing the testing method, etc., the probe station or wafer testing platform involved in the above technical solution only completes the testing of one chip per movement , so there are disadvantages of slow speed and low efficiency

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