Uniform temperature type polysilicon reducing furnace

Abstract

An uniform temperature type polysilicon reducing furnace comprises a bearer (1), a water jacket tube plate (10) and a furnace body (33), wherein the water jacket tube plate (10) is installed on the bearer (1); and the furnace body (33) is installed on the water jacket tube plate (10) through a flange. The uniform temperature type polysilicon reducing furnace is characterized in that the furnace body (33) is composed of a furnace cylinder inner wall (18), arc-shaped furnace outer cylinder (19) and a spherical furnace outer cylinder (20), wherein the furnace cylinder inner wall (18) facing the furnace chamber is provided with a thermoreflectance coating; Spirally arranged shoe plates (24) are installed both between the furnace cylinder inner wall (18) and the arc-shaped furnace outer cylinder (19) and between the furnace cylinder inner wall (18) and the spherical furnace outer cylinder (20). The bottom of the arc-shaped furnace outer cylinder (19) is provided with a cooling water outletand inlet (26) for cooling the furnace body (33). The cooling water between the furnace cylinder inner wall (18) and the arc-shaped furnace outer cylinder (19) and the spherical furnace outer cylinder (20) spirally rises to a steam outlet (23) arranged at the top of the furnace body and is discharged out of the furnace body (33). The joint of an electrode sleeve (12) and a water jacket tube plate(10) is provided with a silk screen or semicircular capillary cooling component (36). The furnace core space outlets of a raw material gas nozzle (32) and a tail gas outlet duct (5) are provided withporous or cancellate filter mantles (37). The furnace provided by the invention has advantages of large size, good cooling effect of the thick tube plate, uniform furnace velocity field and temperature field and remarkable energy-saving effect.

Description

technical field [0001] The invention relates to a solar silicon rod production equipment, in particular to a polysilicon reduction furnace, specifically an arc-shaped uniform temperature polysilicon reduction furnace with a diameter of more than 3 meters. Background technique [0002] At present, in the severe situation of high crude oil prices in the world, saving energy and improving energy utilization efficiency have attracted great attention from all countries in the world. In addition, because the energy needed by human beings mainly depends on oil, coal, etc., thermal power and industrial production emit a large amount of CO 2 , global warming is evident. The energy crisis and the deterioration of the ecological environment have become the bottleneck of the development of human civilization. my country's rapidly developing economy and people's living standards continue to improve, energy demand has increased significantly, and carbon emissions have increased day by ...

AI Technical Summary

Problems solved by technology

[0014] The purpose of the present invention is to design an arc-shaped and uniform temperature polysilicon reduction furnace for the problems of low single-furnace output and high energy consumption existing in the current polysilicon reduction furnace, and use the principle of porous capillary for the connection between the thick tube plate and the electrode seat and cooling, avoiding the high-temperature electrode from being burned out, reducing the welding workload, and solving the problem of thermal deformation of the thick tube plate

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