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Method for manufacturing wavelength conversion element

A technology of wavelength conversion element and manufacturing method, which can be applied in nonlinear optics, instruments, optics, etc., and can solve problems such as output instability

Inactive Publication Date: 2012-05-30
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In addition, when using LiNbO with polarization inversion 3 , LiTaO 3 In the wavelength conversion element of the equal-height nonlinear optical crystal, the output becomes unstable due to the change in the refractive index (photorefraction) caused by light damage

Method used

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  • Method for manufacturing wavelength conversion element
  • Method for manufacturing wavelength conversion element
  • Method for manufacturing wavelength conversion element

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0042] First, use Figure 1 to Figure 7 , the method of manufacturing the wavelength conversion element according to Embodiment 1 of the present invention will be described.

[0043] figure 1 It is a flowchart showing the manufacturing method of the wavelength conversion element in Embodiment 1. in addition, figure 2 It is a process sectional view showing the manufacturing method of the wavelength conversion element in Embodiment 1, figure 2 (a) shows a cross-sectional view of a nonlinear optical crystal substrate used as a material of a wavelength conversion element ( figure 1 step 1) in the figure 2 (b) shows the step of forming the polarization inversion part ( figure 1 The cross-sectional view after step 2) in figure 2 (c) means after the aging process ( figure 1 Sectional view after step 3) in . image 3 A cross-sectional view illustrating aging treatment in Embodiment 1 is shown.

[0044] correspond figure 1 Each of the shown steps describes the manufacturi...

Embodiment approach 2

[0095] Next, a method of manufacturing the wavelength conversion element according to Embodiment 2 of the present invention will be described.

[0096] Figure 8 A cross-sectional view illustrating an aging step in the method of manufacturing the wavelength conversion element 3 in the second embodiment is shown.

[0097] The difference from the first embodiment described above is that in the aging step in the manufacturing method of the wavelength conversion element 3, the nonlinear optical crystal substrate 1 is irradiated with the first light 4 having the same wavelength as the fundamental wave, and the second light having the same wavelength as the fundamental wave. The second light 10 with the same harmonic wave makes the first light 4 and the second light 10 incident in parallel with respect to the transmission direction, and the change amount of the phase matching temperature per unit time of the nonlinear optical crystal substrate 1 reaches a predetermined Irradiate un...

Embodiment approach 3

[0103] Next, a method of manufacturing the wavelength conversion element according to Embodiment 3 of the present invention will be described.

[0104] Figure 9 A cross-sectional view illustrating an aging step in the method of manufacturing the wavelength conversion element 3 in Embodiment 3 is shown.

[0105] The difference from Embodiment 2 above is that in the aging process in the manufacturing method of the wavelength conversion element 3, the nonlinear optical crystal substrate 1 is irradiated with the first light 4 having the same wavelength as the fundamental wave, and the second light having the same wavelength as the fundamental wave. The second light 10 with the same harmonic wave makes the first light 4 and the second light 10 intersect in the nonlinear optical crystal substrate 1, and the phase matching temperature of the nonlinear optical crystal substrate 1 changes in the amount per unit time to reach a predetermined Irradiate until the determined reference va...

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Abstract

Disclosed is a method for manufacturing a wavelength conversion element (3) that converts a fundamental wave into a second harmonic wave, the method comprising a formation of a periodical polarization reversal structure on a nonlinear optical crystal substrate (1) (Step 2) and a subsequent aging step during which first light (4) having the same wavelength as the fundamental wave is incident on the nonlinear optical crystal substrate while the temperature of the nonlinear optical crystal substrate (1) is maintained at approximately the phase matching temperature until the amount of change in the phase matching temperature per unit time is reduced to less than or equal to a predetermined reference value (Step 4).

Description

technical field [0001] The present invention relates to a manufacturing method of a second harmonic generation wavelength conversion element (hereinafter referred to as SHG wavelength conversion element or simply wavelength conversion element) used in laser light source devices and the like. Background technique [0002] Conventionally, gas laser light source devices such as Ar gas laser and Kr gas laser are known, but the energy conversion efficiency of these gas laser light source devices is as low as 0.1%, and cooling equipment is required, so it is difficult to miniaturize the device. Therefore, wavelength conversion laser devices using highly efficient nonlinear optical effects are attracting attention as imaging or medical lasers. In order to obtain nonlinear optical effects, nonlinear optical crystals with multiple refractive indices are required, using LiNbO 3 (Lithium niobate: PPLN) An SHG wavelength conversion element formed by inverting the periodic polarization ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/37
CPCG02F1/3532G02F2203/60G02F1/3544
Inventor 青野晓史水内公典
Owner PANASONIC CORP
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