The invention discloses a
ceramic chip of a
NOx sensor. An
oxygen pump
anode covered with a protective layer on the surface is arranged on a first-layer membrane, an acquisition cavity is formed on the
oxygen pump
anode and the first-layer membrane, second to fourth through holes are formed in a second-layer membrane, a first
diffusion barrier is formed in the second through hole and divides the second through hole into a first measurement chamber and a buffer cavity, a main
oxygen pump
cathode is arranged in the first measurement chamber, a second
diffusion barrier is arranged between the second through hole and a third through hole, the third through hole is a second measurement chamber, an auxiliary pump
cathode is arranged in the second measurement chamber, a third
diffusion barrier isarranged between the third through hole and the fourth through hole, the fourth through hole is a third measurement chamber, a measurement
electrode covered with a protective layer on the surface isarranged in the third measurement chamber, a reference channel is formed in a third-layer membrane, a
reference electrode covered with a protective layer on the surface is arranged in the reference channel, a heating
electrode wrapped in a heating
electrode insulating layer is arranged between the fourth-layer membrane and a fifth-layer membrane, an outer lead of the heating electrode penetrates through the fifth-layer membrane to be located on the lower surface of the fifth-layer membrane, and a stress release hole filled with heating electrode insulating layer
slurry is formed in the fifth-layer membrane.