Nitrogen oxide sensor chip

Abstract

The invention discloses a nitrogen oxide sensor chip. The nitrogen oxide sensor chip is formed by laminating six layers of substrates which are made of zirconium oxide, wherein the second layer of substrate comprises four cavities, namely a first cavity, a second cavity, a third cavity and a fourth cavity; three rows of diffusion barrier layers are respectively arranged among the four cavities in turn; a first electrode is arranged in the third cavity; a second electrode and a third electrode are arranged in the fourth cavity; the third layer of substrate is provided with a reference gas channel connected with atmosphere; a reference electrode is arranged between the third layer of substrate and the fourth layer of substrate; a porous aluminum oxide layer is covered on the reference electrode; the reference gas channel is communicated with the porous aluminum oxide layer through small holes; a heating electrode is arranged between the fourth layer of substrate and the fifth layer of substrate; an insulating layer is arranged on the upper part and the lower part of the heating electrode respectively; the first layer of substrate is provided with a fourth electrode; and a protective layer is covered on the fourth electrode. The nitrogen oxide sensor chip with the structure can prevent gold in a non-activated electrode from polluting an activated electrode due to volatilization during sintering, is not required to be sintered stepwise, and is formed by laminating the six layers of substrates and sintering at one time.

Description

technical field [0001] The invention relates to a nitrogen oxide sensor chip, in particular to a planar nitrogen oxide sensor chip using yttrium-stabilized zirconia as an electrolyte, and belongs to the field of automobile exhaust gas control systems. . Background technique [0002] With the intensification of the energy crisis worldwide and the increasingly stringent emission regulations, the fuel-saving and emission issues of internal combustion engines have attracted more and more attention. Various countries and regions have re-enacted new automobile fuel economy regulations, and the restrictions on the emission of nitrogen oxides in automobile exhaust are becoming more and more stringent. Nitrogen oxide sensors have always been a research hotspot in the field of automotive sensors. Due to The vehicle nitrogen oxide sensor must work in the engine working environment, and the nitrogen oxide sensor must have the following three functions: [0003] (1) Due to the high tem...

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Problems solved by technology

[0011] This method can indeed prevent the gold in the non-activated electrode from polluting the activated electrode, but the manufacturing process is complicated, and the connection of

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