Nitric oxide gas sensitive material manufacturing method, sensor, monitoring device and control method

Abstract

The invention discloses a nitric oxide gas sensitive material manufacturing method, a sensor, a monitoring device and a control method. The prepared gas sensitive material is composed of a SnO2 nanometer powder body and a WO3 nanometer powder body, the sensor of the prepared nitric oxide based on the gas sensitive material comprises the gas sensitive material which is obtained according to the claim 1, an MEMS (Micro-Electromachanical) control unit, a silicon dioxide insulating layer, an electrode as well as a reference electrode, a heating wire and a thermocouple. Compared with the prior art, the nitric oxide sensor provided by the invention has the beneficial effects that the cost is low, the volume is reduced, and the energy consumption is low.

Description

technical field [0001] The invention relates to a manufacturing method of a nitrogen oxide gas sensitive material, a sensor, a monitoring device and a control method. Background technique [0002] The main structure of existing commercial NOx sensors is a multi-layer planar zirconia solid electrolyte sensor. The solid electrolyte oxygen sensor is an oxygen sensor made of solid oxygen sensitive materials as the electrolyte. Currently, the most used solid electrolyte materials are ZrO2, LiCO3, NASICON, etc. Because the solid electrolyte is in a solid state, there is no electrolyte volatilization and corrosion of electrode materials, etc. The problem is that the sensor packaging is easy, which is conducive to the miniaturization of the sensor. [0003] At present, the multi-layer planar zirconia nitrogen oxide has a large sensor volume, an expensive system, and in terms of durability, sensitivity (especially under the condition of low ppm content) and selectivity (cannot disti...

AI Technical Summary

Problems solved by technology

In this method, it is likely that the inconsistency in the shrinkage of the two materials during the sintering process will cause the electrolyte and the sensitive electrode to peel off, resulting in cracking, warping, separation, etc., which greatly reduces the three reaction interfaces (gas, oxidation, etc.) zirconium-based electrolyte, sensitive electrode) contact area, reduce the catalytic activity of the sensitive electrode, cause the oxidation and reduction reaction speed of the electrode surface to decrease, and finally affect the detection sensitivity of the sensor in the high temperature section (>700°C)

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