Manufacturing method of dynamic infrared scene generating device of optical fiber array
A technology of optical fiber array and infrared scene, which is applied in the direction of light guide, optics, optical components, etc., can solve the problems of poor controllability of the production process and complicated production process, and achieve the effect of convenient optical path design, precise parameter control and mature production process
Inactive Publication Date: 2012-06-13
BEIJING INSTITUTE OF TECHNOLOGYGY +1
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[0011] The present invention proposes a manufacturing method of a dynamic infrared scene generating device for an optical fiber array, which uses a MEMS process to manufacture an optical fiber array on a substrate and forms a visible light-absorbing infrared radiation layer on the top of each pixel column of the optical fiber array; The dynamic infrared scene generation device overcomes the complex manufacturing process, poor controllability and complicated manufacturing process of the optical fiber-based infrared image generator in the prior art
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[0054] In order to better illustrate the purpose and advantages of the present invention, the implementation of the method of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples.
[0055] A manufacturing method of an optical fiber array dynamic infrared scene generating device, the steps of which are as follows figure 1 shown, including:
[0056] Step 1. Select the substrate;
[0057] The optical path of the device application adopts a reflective optical path, and the frame frequency is required to be 100Hz, so silicon is selected as the substrate material and polished on one side.
[0058] The size of the substrate is 2 inches and the thickness is 0.3mm.
[0059] Step 2, cleaning the polished surface of the substrate;
[0060]The polished surface of the silicon substrate was cleaned sequentially with ultrasonic waves, acetone, ethanol and deionized water.
[0061] Step 3, making an optical fiber array ...
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The invention relates to a manufacturing method of a dynamic infrared scene generating device of an optical fiber array, belonging to the technical field of generation of a dynamic infrared scene. According to the method, an MEMS (Micro-electromechanical Systems) process is used for manufacturing the optical fiber array on a silicon wafer or a glass sheet; and meanwhile, a visible-light-absorbing and infrared-radiating layer is manufactured at the top end of the optical fiber array. The method comprises the following operation steps of: selecting and washing a substrate; manufacturing an etching base layer of the optical fiber array; manufacturing the visible-light-absorbing and infrared-radiating layer and manufacturing a metal etching mask layer; etching an image through photoetching; manufacturing a metal mask layer image, cleaning a material of the visible-light-absorbing and infrared-radiating layer at the spacing between the images of a metal mask plate; and etching the etching base layer of the optical fiber array, removing the residual metal mask layer and carrying out ending step of manufacturing the device. The method provided by the invention has the advantages of simplicity in operation, developed manufacturing process, accuracy in parameter design and manufacturing, and very good application prospect.
Description
technical field [0001] The invention relates to a manufacturing method of an optical fiber array dynamic infrared scene generation device, and belongs to the technical field of dynamic infrared scene generation. Background technique [0002] Infrared scene generation technology is the core technology of the hardware-in-the-loop simulation system for infrared imaging guidance, and plays an important role in the simulation of the hardware-in-the-loop system for infrared imaging guidance technology. The dynamic infrared scene generation technology simulates the infrared radiation characteristics of the target and the background under laboratory conditions, and provides real-time infrared image sources of the infrared target and background for the tested infrared image sensor. [0003] Dynamic infrared image generation technology can be classified into two types: direct radiation type and radiation modulation type. [0004] For direct radiation image converters, the imaging pix...
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IPC IPC(8): G02B6/13G02B6/138
Inventor 钱丽勋李卓周振浩单伟周丽丽唐成李平欧文
Owner BEIJING INSTITUTE OF TECHNOLOGYGY