Device and method for detecting force electromagnetic coupling behavior of giant magneto resistive film

Abstract

The invention discloses a device and a method for detecting the force electromagnetic coupling behavior of a giant magneto resistive film, and belongs to the technical field of engineering materials, structural deformation, mechanics experiment and electrical experiment. The device comprises a magnetic field generator, a giant magneto resistive film hysteresis loop measurement optical path, a film stress measurement optical path, and a film resistance probe tester. The giant magneto resistive film hysteresis loop measurement optical path comprises a laser, diaphragms, reflectors, a polarizer, an analyzer, a lens and a photoelectric detector; and the film stress measurement optical path comprises a laser, a spatial filter, a calibrator, reflectors, and a charge couple device (CCD) camera. A uniform magnetic field is provided by the magnetic field generator; the hysteresis loop is measured according to a magneto-optic Kerr effect; curvature of the surface of the film is measured by a multi-beam optical stress sensitivity technology; the stress of the film is obtained according to the relation expression of the curvature and the stress; the resistivity of a film material is measured by the film resistance probe tester; and coupling relational expressions of the resistance of the giant magneto resistive film and the magnetic induction density and stress of the film can be obtained finally.

Description

technical field [0001] The invention relates to a detection device and method for the force-electromagnetic coupling behavior of a giant magnetoresistive thin film, and belongs to the technical fields of engineering materials, structural deformation, mechanical experiments, and electrical experiments. Background technique [0002] Giant magnetoresistance thin film material is a very important functional material in microelectronics and information technology. It has a variety of unique physical properties, such as giant magnetoresistance effect, magnetic anisotropy, magneto-optical Kerr effect, magnetostriction effect, etc. , especially utilizing the giant magnetoresistance effect of the giant magnetoresistance film, it has been widely studied and applied in many aspects of modern technology, especially magnetic storage media. As an important functional film, giant magnetoresistive thin films are often in a multi-field coupling environment when they work, and their physical ...

AI Technical Summary

Problems solved by technology

However, there are few studies on the force-electromagnetic coupling behavior of giant magnetoresistive thin films, especially the research on the influence of the mechanical properties of giant magnetoresistive thin films on their giant magnetoresistance effect is of great significance in theory and application.

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