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Passivation method of excimer laser gas configuration device

An excimer laser and configuration device technology, applied in metal material coating process, coating, solid-state diffusion coating, etc., can solve problems such as inability to meet demand, low F2 content, etc., to prevent further corrosion, form stable, cost-effective low effect

Active Publication Date: 2013-11-20
GUANGDONG SOUTHCHINA SPECIAL GAS INST
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Problems solved by technology

However, for F 2 The content is very small and requires a special gas with an extremely stable content. Using the above method cannot meet the demand

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  • Passivation method of excimer laser gas configuration device

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Embodiment Construction

[0015] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0016] Please refer to figure 1 , the passivation method of a kind of excimer laser gas configuration device of the present invention, this method comprises the following steps:

[0017] The first step: pre-passivation treatment: clean up the impurities in the configuration device, and use N 2 Blow off the excimer laser gas configuration device; specifically, to clean up impurities such as dirt in the pipeline in the configuration device, and then use high-purity N 2 Blow off, then seal for later use.

[0018] Step 2: Passivation treatment: Inject F into the excimer laser gas configuration device 2 Mixed gas with He, after constant temperature and pressure for a period of time, use N 2 Blow off the excimer laser gas configuration device; it is divided into three steps:

[0019] A) Keep the temperature of the excimer laser gas configuration device at 40-6...

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Abstract

The invention relates to a passivation method of an excimer laser gas configuration device. The method is characterized in that the method comprises the following steps: 1, carrying out passivation preprocessing: cleaning the excimer laser gas configuration device to remove impurities therein, and blowing the excimer laser gas configuration device by N2; 2, carrying out passivation processing: inletting a mixed gas of F2 and He to the excimer laser gas configuration device, maintaining a constant temperature and a constant pressure for a period of time, and blowing the excimer laser gas configuration device by N2; and 3, inletting N2 to the excimer laser gas configuration device, and sealing to complete the passivation of the excimer laser gas configuration device. The He gas with small molecular weight and strong diffusion capability is used to substitute N2 used in the prior art, and passivation temperature conditions are changed, so an oxidation film which is stable and compact is tough and firm because of the increased penetration degree, thereby the further corrosion of a metal matrix can be effectively controlled. A configured excimer laser which has the advantages of stable output energy and uniform energy distribution can completely satisfy requirements of laser treatment for ophthalmic operations and costs low.

Description

【Technical field】 [0001] The invention relates to a passivation method for an excimer laser gas configuration device, in particular to a passivation method for an argon fluoride excimer laser gas configuration device. 【Background technique】 [0002] Excimer laser gas has been used in the treatment of ophthalmic diseases for about 30 years. F 2 There are many kinds of excimer laser gases, among which F 2 Gas is an indispensable component of the ratio, and it is the main source of energy for the laser during surgery. my country began to import excimer laser machines in the early 1990s, and the domestic model was successfully developed in 2001. But it is expensive and consumes a lot of working gas source laser gas. Laser gas basically relies on imports. Although a small amount of domestic gas is put into the market, most of them have shortcomings such as unstable energy and short shelf life. Analysis of the reasons shows that in the laser gas, F 2 The content is very small...

Claims

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Application Information

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IPC IPC(8): C23C8/08
Inventor 陈平赵克连张智宏
Owner GUANGDONG SOUTHCHINA SPECIAL GAS INST
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