Network single crystal furnace signal collector

Abstract

The invention discloses a network single crystal furnace signal collector, comprising a multichannel signal collection circuit which comprises a digital signal collection circuit, a standard analog signal collection circuit, and a nonstandard analog signal collection circuit, a filter circuit which comprises a passive filter circuit for carrying out passive filtering on digital signals, a first-order active low pass filter circuit for carrying out first-order active low pass filtering on standard analog signals, a sampling period adjustable circuit for controlling the prolongation or reduction of a sampling period, a central processing unit circuit which is respectively connected with the nonstandard analog signal collection circuit, the filter circuit, and the sampling period adjustable circuit and is used for processing the nonstandard analog signals, the digital signals and the standard analog signals according to the sampling period controlled by the sampling period adjustable circuit, and a network transmission circuit which is connected with the central processing unit circuit and is used for carrying out bulk transfer on different signals processed by the central processing unit circuit. According to the invention, diversified signal collection, filtering processing and transmission can be realized, and the speed of signal collection is adjustable.

Description

technical field [0001] The invention relates to the technical field of networked management of silicon single crystal furnaces, in particular to a network single crystal furnace signal collector. Background technique [0002] At present, there are many companies producing single crystal furnaces in the market, and there is a situation where a single crystal silicon manufacturer uses different types of single crystal furnaces. In this era of integration and standardization, a signal collector is needed to collect the signals of different types of single crystal furnaces and transmit them to the central controller for centralized management. The signal collector came into being under this background and has certain market practicability. The existing signal collectors on the market, such as the American Fluke 2640A NetDAQ network data collector system, however, the system is relatively large and expensive, which increases the system cost and operating burden; and such as EM91...

AI Technical Summary

Problems solved by technology

[0009] However, the existing technology cannot fully meet the needs of network single crystal furnace signal acquisition, specifically:

[0010] In terms of structure setting, when signal acquisition is performed in the prior art, the signal is generally divided into standard signal processing, and the common standard range signal is processed. The structure is single, and it cannot handle diversified signals. For weak signals, ordinary signal collectors cannot meet the requirements of acquisition accuracy and resolution.

[0011] In terms of signal acquisition speed, the existing technology pursues the rapidity of signal acquisition, while the network single crystal furnace signal acquisition does not have high requirements for information acquisition speed, and the excessively high acquisition speed of the existing technology increases the overall burden of the network single crystal furnace system

[0012] In terms of filter processing, for different signals, the signal filter processing is different, and the existing technology generally has the same filter circuit, which leads to deviations in the acquisition of special signals

[0013] In terms of network transmission, the existing technology does not have the network transmission function to set and distinguish signal types, and the networked signal transmission of single crystal furnaces is different from traditional signal transmission, and the signals need to be distinguished

Images