One-eighth wave plate phase retardation measurer and measuring method
A measuring device and wave plate phase technology, applied in the field of polarized light, can solve the problems of difficulty in improving measurement accuracy, difficult installation and adjustment, complex structure, etc., and achieve the effects of fast measurement speed, simple structure and high measurement accuracy
Active Publication Date: 2012-06-27
BEIJING GUOWANG OPTICAL TECH CO LTD
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Problems solved by technology
However, this measurement device uses unconventional optical elements such as two-dimensional gratings, analyzer arrays, and photodetector arrays, which have the disadvantages of complex structure and difficult installation. precision
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[0024] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.
[0025] see first figure 1 , figure 1 It is a structural block diagram of an embodiment of a real-time measurement device for phase delay of an eighth-wave plate in the present invention. Depend on figure 1 It can be seen that the embodiment of the measuring device for the phase retardation of the one-eighth wave plate of the present invention includes a collimated light source 1, and along the forward direction of the light beam emitted by the collimated light source 1, there are in turn a polarizing beam splitter 2, a quarter Socket 4 of a wave plate 3, one-eighth wave plate, reflecting mirror 5, place the first photodetector 6 on the reflected light beam direction of described polarization beam splitter 2, perpendicular to incident light and with described The opposite...
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Disclosed are a one-eighth wave plate phase retardation measurer and a measuring method. The measurer comprises a collimating light source, and is characterized by successively consisting of a polarization spectroscope, a one-fourth wave plate, a one-eighth wave plate inserting opening and a reflector along an advancing direction of a light beam emitted from the collimating light source, a first photoelectric detector is placed on the polarization spectroscope in a light beam reflecting direction, a second photoelectric detector is placed in a direction which is perpendicular to incident light and opposite to the first photoelectric detector, output ends of the first photoelectric detector and the second photoelectric detector are connected with an input end of a signal processing unit, and an angle formed between a fast axis of the one-fourth wave plate and a light transmission axis of the polarization spectroscope is 45 degrees. Experiments show that the one-eight wave plate phase retardation measurer and the measuring method have the advantages of simple structure, fast measurement speed and high measurement precision.
Description
technical field [0001] The invention relates to the technical field of polarized light, and relates to an eighth-wave plate phase retardation measuring device and a measuring method. Background technique [0002] Eighth-wave plates are widely used in immersion lithography illumination systems, nonlinear optical systems, optical time multiplexing systems, optical sensors, special interferometers, synchronous phase shifters and other applications. An eighth wave plate is usually placed in the reflective optical path to convert the linearly polarized light passing through it twice into circularly polarized light to achieve a change in polarization state. During the use of one-eighth wave plate, the phase delay error seriously affects its use effect, so it is necessary to accurately measure its phase delay. Usually, the azimuth angle of the fast axis of the one-eighth wave plate is not marked, and it is required that the measurement result of the phase delay has nothing to do w...
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Inventor 方瑞芳曾爱军刘龙海朱玲琳袁乔黄惠杰
Owner BEIJING GUOWANG OPTICAL TECH CO LTD