Heavy caliber plane optical element polishing disk surface smoothness online detection system
An optical element and surface smoothing technology, applied in grinding devices, grinding machine tools, metal processing equipment, etc., can solve the problems affecting the processing quality of workpieces, unevenness, uneven surface of polishing discs, etc., to achieve simple structure, easy integration, and operation. handy effect
Inactive Publication Date: 2014-07-23
XIAMEN UNIV
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[0005] The purpose of the present invention is to provide a large-diameter planar optical element polishing disc surface flatness online The detection system is used to collect the three-dimensional image of the flatness of the polishing disc surface before or during polishing, and then compare the measured three-dimensional image of the flatness of the polishing disc with the surface figure in the surface shape database of the system to determine whether to perform polishing pad dressing And the angle at which the trimming axis needs to be tilted during trimming
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[0030] The technical solution of the present invention will be further elaborated below in conjunction with the accompanying drawings.
[0031] see figure 1 and 2 , the embodiment of the present invention is provided with 2 DSP cameras 8, a support frame 7, a data transmission device 10 and a computer 11; the support frame 7 is fixed on the shockproof block 12, and the support frame 7 and the shockproof block 12 are locked together on the machine tool On the bed 5 and in the vertical direction, the two DSP cameras 8 are arranged below the support frame 7, the distance between the two DSP cameras 8 is the distance between human eyes, and each DSP camera 8 is at an angle of 5-10° to the horizontal direction , the radial length of the overlapping shooting area of the two DSP cameras 8 is the radius of the polishing disc 1, by setting the rotating speed of the polishing machine tool rotating shaft 6 and the time of simultaneous shooting by the two DSP cameras 8, two pictures of...
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A heavy caliber plane optical element polishing disk surface smoothness online detection system relates to detection of an optical element and is provided with two digital signal processor (DSP) cameras, a support frame, a data transmission device and a computer. The support frame is fixed on an anti-shock block, the support frame and the anti-shock block are together locked on a tool bed of a machine tool and arranged in the vertical direction, the two DSP cameras are disposed below the support frame, the distance between the two DSP cameras is the human eye distance, an angle of 5 degrees to 10 degrees is formed between each DSP camera and the horizontal direction, and the radial-direction length of a coincidence shooting area of the two DSP cameras is the radius of a polishing disk. By arranging rotation speed of a rotation shaft of a polishing machine tool and the simultaneous shooting time of the two DSP cameras, two pictures at different angles are generated to form parallax error, and then the collected two pictures with parallax error are output to the computer to be processed through the data transmission device.
Description
technical field [0001] The invention relates to a detection of an optical element, in particular to an on-line detection system for the flatness of the surface of a polishing disk of a large-caliber plane optical element. Background technique [0002] Ultra-precision surfaces are widely used in various industrial fields. At present, they are mainly concentrated in two aspects: one is the field of engineering optics represented by strong lasers and short-wave optics, such as: laser fusion systems, ultraviolet optical systems, X-ray Optical systems, X-ray laser systems, high temperature plasma diagnosis and other optical fields. In such systems, the optical components used to increase the damage threshold should be precise and smooth in order to minimize scattering losses. The second is the field of electronics industry, which is dominated by devices such as magnetic recording heads and large-scale integrated circuit substrates. The continuous development of modern science a...
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IPC IPC(8): B24B37/005
Inventor 郭隐彪潘日张东旭杨峰陈梅云
Owner XIAMEN UNIV