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Method for measuring temperature-controllable four-probe square resistance and resistivity

A technology of sheet resistance and test method, applied in the field of measurement, can solve the problems of limited application, unable to test sheet resistance and resistivity, etc., and achieve the effects of high sensitivity, compact structure and convenient use.

Inactive Publication Date: 2012-07-04
DONGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the existing four-probe testers can only test the sheet resistance at room temperature and relatively stable temperature, and cannot test the sheet resistance and resistivity of semiconductor materials under continuous temperature changes or different temperatures, which limits its application.

Method used

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  • Method for measuring temperature-controllable four-probe square resistance and resistivity
  • Method for measuring temperature-controllable four-probe square resistance and resistivity
  • Method for measuring temperature-controllable four-probe square resistance and resistivity

Examples

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Embodiment 1

[0022] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0023] The present invention provides a method for testing square resistance and resistivity using a temperature-adjustable four-probe square resistance testing system, such as figure 1 As shown, the circuit mainly consists of a MC1403 precision low-voltage reference power supply and an OP07 bipolar operational amplifier. The low-noise, high-precision characteristics of the OP07 bipolar operational amplifier are ideal for amplifying weak signals from sensors. The positive pole of the 20V external power supply with adjustable output voltage is respectively connected to pin 1 of MC1403 precision low-voltage reference power supply and pin 7 of OP07 bipolar operational amplifier, pin 3 of MC1403 precision low-voltage reference power supply is grounded, and pin 2 is connected to Resistor R1 is connected to pin 3 of R1OP07 bipolar operational amplifier. The...

Embodiment 2

[0045] The specific steps for testing resistivity are:

[0046] Step 1: Connect the circuit of the temperature-adjustable four-probe square resistance test system, connect the host to the power supply, and preheat for 6 minutes;

[0047] Step 2: Estimate the resistivity of the sample to be tested at about 100,000, select K4 on the panel of the host as needed, and adjust K5 to "ρ" to measure the resistivity of the sample;

[0048] Step 3: Place the sample to be tested on the metal gasket of the base of the four-probe test platform, connect the thermocouple to the temperature tester, and make the thermocouple contact the surface of the sample to be tested, and then press down the four probes;

[0049] Step 4: Start the electric furnace wire heating device, adjust the heating rate, use a thermocouple and a temperature tester to measure the temperature of the sample to be tested as T1=30°C, T2=90°C;

[0050] Step 5: According to VO 2 The characteristics of the thermally induced ...

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Abstract

The technical scheme of the invention provides a method for measuring temperature-controllable four-probe square resistance and resistivity. The method comprises the steps of completing circuit connection of a temperature-controllable four-probe square resistance measurement system, connecting power to a master unit and preheating for 5 to 10 minutes; selecting a proper current range on the panel of the master unit according to requirement, and selecting resistivity or square resistance of a to-be-measured sample; placing the to-be-measured sample in the base of a four-probe test platform; connecting a thermocouple with a temperature test instrument to make the thermocouple keep contact with the surface of the to-be-measured sample, and pressing down four probes; starting an electric furnace wire heating device, adjusting the heating rate, and measuring temperature of the sample by the thermocouple and the temperature test instrument; querying a parameter C and inputting the value of parameter C; continuously observing the temperature test instrument after completing the adjustment; and recording data, which is the resistivity or square resistance of the sample at the temperature, in a display when temperature meets the requirement.

Description

technical field [0001] The invention relates to a temperature-adjustable four-probe square resistance and resistivity testing method, which is mainly used for measuring the square resistance and resistivity of thin films, and belongs to the field of measurement technology. Background technique [0002] The general four-probe tester is a special instrument for measuring the resistivity and sheet resistance (sheet resistance) of semiconductor materials. It is mainly used to measure the resistivity of rod-shaped and bulk semiconductor materials (including thick and thin sheets) and The sheet resistance of the diffusion layer, ion implantation layer, and anti-epitaxial layer. The instrument has the characteristics of high measurement accuracy, high sensitivity, good stability, wide measurement range and compact structure, and the measurement results are directly displayed by numbers, so it is easy to use. However, the existing four-probe testers can only test the sheet resistan...

Claims

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Application Information

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IPC IPC(8): G01R27/08G01N25/02
Inventor 徐晓峰黄海燕汪海旸何兴峰
Owner DONGHUA UNIV
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