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Large-caliber plane mirror surface-shaped detection device

A detection device and large-caliber technology, applied in the field of optics, to achieve low cost, good repeatability, and good test accuracy

Inactive Publication Date: 2012-07-11
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] In order to solve the above-mentioned technical problems in the background technology, the present invention proposes a device for detecting the shape of a large-diameter plane mirror by using a fiber laser and a Hartmann wavefront sensor, which solves the problem of testing the shape of a large-diameter plane mirror, and can Effectively test the surface shape of large-aperture flat mirrors, and ensure the test accuracy

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  • Large-caliber plane mirror surface-shaped detection device
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  • Large-caliber plane mirror surface-shaped detection device

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Embodiment Construction

[0015] see figure 1 ,

[0016] Fiber laser 1, beam splitter 2, absorber 3, high-precision turntable 4, large-diameter plane mirror 5, standard spherical mirror 6, collimating lens 7, Hartmann wavefront sensor 8, control and acquisition computer 9. The beam splitter 2 is set on the outgoing light path of the fiber laser 1, and the beam splitter 2 divides the incident light incident on the beam splitter 2 into transmitted light and reflected light; the absorber 3 is set on the reflected light path after the beam splitter 2, absorbing the transmitted light The reflected light after the beam splitter 2 ensures the safety of testers; the standard spherical reflector 6 is set on the transmitted light path after the beam splitter 2; the standard spherical reflector 6 reflects the incident light incident on the standard spherical reflector 6 to the beam splitter mirror and reflected by the beam splitter 2 to the detection unit. The detection unit includes a collimator lens 7 and a H...

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Abstract

The invention relates to a large-caliper plane mirror surface-shaped detection device. The large-caliber plane mirror surface-shaped detection device comprises a laser, an absorbing body, a beam splitting mirror, a standard spherical surface reflecting mirror, a detection unit and a control and acquisition computer, wherein the beam splitting mirror is arranged on an emitting light path of the laser and is used for splitting incident light entering the beam splitting mirror into transmitting light and reflecting light; the absorbing body is arranged on a reflection light path passing through the beam splitting mirror; the standard spherical surface reflecting mirror is arranged on a transmitting light path passing through the beam splitting mirror and is used for reflecting the incident light entering the standard spherical surface reflecting mirror to the beam splitting mirror; the incident light is reflected to the detection unit by the beam splitting beam; and the control and acquisition computer is connected with the detection unit. The invention provides a device for detecting the large-caliper plane mirror surface shape by using an optical fiber laser and a Hartmann wave-front sensor; and according to the device, the problem of the test of the large-caliper plane mirror surface shape is solved, the surface shape of the large-caliper plane mirror can be effectively tested and the test precision can be better ensured.

Description

technical field [0001] The invention belongs to the field of optics, and relates to a surface shape detection device, in particular to a large-caliber plane mirror surface shape detection device. Background technique [0002] There are two main detection methods for quantitatively testing the surface shape of large-diameter plane mirrors: direct detection and indirect detection. [0003] For the direct detection method, an interferometer with the same diameter as the plane mirror to be measured is required. However, with the development of space science and technology, the use of plane mirrors with a diameter greater than Φ800mm is increasing. At present, the largest interferometer in China is Φ800mm. 10,000), poor economy. [0004] For indirect detection methods, there are mainly two types: sub-aperture stitching method and Ricky-Common method. These two methods can detect flat mirrors with large apertures, and at the same time, the actual detection cost is also reduced....

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 段亚轩陈永权赵建科李坤龙江波
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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