Glass substrate defect inspection device and glass substrate defect inspection method
A technology for inspection of glass substrates and defects, applied in measuring devices, optical devices, and material analysis through optical means, can solve problems such as no public solutions, jumping of the front end of the glass substrate, and no public solutions to problems, etc. Achieve high-precision inspection and ensure flatness
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[0024] Hereinafter, embodiment of the glass substrate defect inspection apparatus of this invention is demonstrated based on drawing.
[0025] figure 1 It is a block diagram showing the first embodiment of the glass substrate defect inspection apparatus 100 . The glass substrate defect inspection apparatus 100 roughly includes: an inspection unit 10 for inspecting a glass substrate P; unit 40; an air supply and suction unit 50 including a compressed air supply source 51 for supplying compressed air to the transport unit 40 and a vacuum supply source 52 for sucking in air; and an overall control unit 60 for monitoring and controlling the status of each part.
[0026] figure 2 It is a figure which shows the schematic structure seen from the upper part of the conveyance part 40 which concerns on 1st Embodiment of this invention. The air suspension stage 20 has a plurality of rectangular divided stages 21 arranged in the conveyance direction (X) and the direction Y perpendicul...
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