Optical element fixing device and installation method thereof

Abstract

The invention provides an optical element fixing device and an installation method thereof. The optical element fixing device comprises a microscope base, flexible elements and ball pins, wherein at least three grooves are formed at equal intervals on the inner wall of the microscope base; the flexible elements are arranged in the grooves in a matching way; and the ball pins are used for connecting the flexible elements with the microscope base. The radial force of the fixing device is controlled by controlling the friction coefficient and transition matching way between the ball pins and corresponding conical sleeves as well as the friction coefficient and transition matching way between a cylindrical pin and a corresponding conical sleeve, so that the influences caused by the thermal deformation and assembly stress deformation of an optical element or optical assembly on the surface type of the optical element are controlled; a flexible element multipoint gluing support structure is adopted, so that the influence of gravity on the surface type is reduced, and release of the thermal stress of an annular optical element in a circumferential direction is realized simultaneously by using the low rigidity characteristics of the flexible elements in a direction which is vertical to the optical axis; and the fixing device provided by the invention has the advantages of simple structure, high stability, convenience for installing, accurate positioning, firm and reliable fixing and wide application range.

Description

technical field [0001] The invention relates to the field of optics, in particular to an optical element fixing device and an installation method thereof. Background technique [0002] With the continuous improvement of lithography resolution requirements, the design requirements for projection imaging objective lenses in the exposure part of advanced lithography equipment are also increasing. High resolution requires the lens to increase the requirements for aberration and system stability in the design. , which not only puts forward higher requirements for the design of the optical system itself, but also greatly increases the difficulty of the structural design of the optical machinery. In the structural design of optical machinery, the stress-free or low-stress fixing technology of optical components can effectively solve the change of the high-resolution lens surface shape, thereby realizing the control of aberrations. For example, in U.S. Patent No. 7,085,080, the len...

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Problems solved by technology

[0005] The purpose of the present invention is to provide an optical element fixing device and its installation method to solve the problems of existing optical element fixing devices, such as insufficient stress relief in certain directions, poor structural stability, insufficient manufacturability and assemblability, etc.

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