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Microstructure for detecting mechanical properties of one-dimensional nanometer materials

A nano-material and micro-structure technology, applied in the field of micro-mechanical technology and nano-material science, can solve the problems that the load of the sample and the deformation of the sample cannot be measured separately at the same time, the calculation error is large, and the implementation cost is high, so as to achieve intuitive measurement and reduce the impact , to ensure the effect of accuracy

Inactive Publication Date: 2014-07-09
XIDIAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Most qualitative, direct measurement methods cannot simultaneously and independently measure the load acting on the sample and the sample deformation
Although the above-mentioned problems can be overcome in the measurement method using electrostatic drive or thermal drive, it has the disadvantages of high implementation cost, large calculation error, etc., and it is easy to affect the sample itself

Method used

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  • Microstructure for detecting mechanical properties of one-dimensional nanometer materials
  • Microstructure for detecting mechanical properties of one-dimensional nanometer materials
  • Microstructure for detecting mechanical properties of one-dimensional nanometer materials

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preparation example Construction

[0039] Below in conjunction with accompanying drawing 3 further illustrate the preparation process of the present invention.

[0040] Referring to Figure 3(a), 01 is the device layer, the material is polysilicon, and the thickness is about 10 μm; 02 is the sacrificial layer, the material is silicon oxide; 03 is the silicon substrate; 04 is the protective layer; 05 is the primary photoresist; secondary photoresist.

[0041] Referring to FIG. 3( b ), a layer of photoresist 05 is coated on the surface of the device layer.

[0042] Referring to FIG. 3(c), the photoresist is etched to form a micromechanical structure pattern.

[0043] Referring to FIG. 3( d ), the device layer is etched to form a micromechanical structure.

[0044] Referring to FIG. 3( e ), the photoresist is removed.

[0045]Referring to FIG. 3( f ), a photoresist 06 is coated on the etched device layer and the surface of the protective layer.

[0046] Referring to FIG. 3(g), the photoresist of the protective ...

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Abstract

The invention discloses a microstructure for detecting mechanical properties of a one-dimensional nanometer material. The microstructure comprises a frame-shaped bracket, wherein two symmetrically arranged upper platforms are connected on the frame-shaped bracket by at least four symmetrical upper vertical beams; the measured nanometer material is fixed between the two upper platforms; two ends of each of the two upper platforms are respectively supported on a supporting seat of the frame-shaped bracket by a lower supporting beam; a lower platform is connected below the two upper platforms by at least four symmetrical oblique beams; and the lower platform is used for applying an external load. The preparation material of the microstructure is polycrystalline silicon, the preparation process of the microstructure is compatible with the existing silicon micromachining process, and the microstructure can be prepared in batches. The load on the one-dimensional nanometer material and the deformation situation of the nanometer material under an effect of the load can be obtained at the same time, and the properties of the nanometer material are not influenced in a detection process.

Description

technical field [0001] The invention relates to the field of micromechanical technology and nanomaterial science, specifically a micromechanical structure for detecting the microstructure of tensile and compressive mechanical properties of one-dimensional nanomaterials, suitable for detecting the Young's mode of onedimensional nanomaterials volume, tensile strength, breaking strength, etc. Background technique [0002] One-dimensional nanomaterials, such as nanotubes, nanowires, and nanoribbons, are low-dimensional nanostructured materials with excellent physical properties, and are expected to have a wide range of applications in the fields of nanoelectromechanical systems, gas sensors, nanoelectronics, and optoelectronic devices in the future prospect. However, as the size of the material decreases, when it is reduced to nanometers, the related effects such as size effect, surface effect and quantum effect are highlighted, making some physical properties of nanomaterials ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B3/00G01N3/02
Inventor 王卫东易成龙郝跃牛翔宇纪翔
Owner XIDIAN UNIV
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