Cooling cavity transmission system in LPCVD (Low-Pressure Chemical Vapor Deposition) process

Abstract

The invention relates to a cooling cavity transmission system in LPCVD (Low-Pressure Chemical Vapor Deposition) process, in particular to a cooling cavity transmission system in LPCVD process, which can reduce the breakage rate of glass. The system comprises a group of driving rollers, as well as driven rollers and a transmitting belt driven by the driving rollers, wherein the driving rollers and the driven rollers are respectively positioned at two ends of the transmitting belt in transmitting direction. The system eliminates two factors causing glass breakage: self deformation of glass substrate and excessively severe local temperature change while the structure is simplified, lowers the breakage rate of glass in transmission process, improves the production stability and is easy to maintain.

Description

technical field [0001] The invention relates to a cooling cavity transmission system in an LPCVD process, in particular to a cooling cavity transmission system in an LPCVD process which reduces glass breakage rate. Background technique [0002] The future market development of photovoltaic applications, especially for use in grid-connected photovoltaic power plants, depends critically on the potential to reduce the cost of solar cell production. The production process of thin-film solar cells consumes less energy, which has the potential to greatly reduce raw material and manufacturing costs; at the same time, thin-film solar cells can still generate electricity under low light conditions. Therefore, the current market demand for thin-film solar cells is gradually increasing, and the technology of manufacturing thin-film solar cells has become a research hotspot in recent years. [0003] ZnO is an N-type direct bandgap semiconductor material with a bandgap Eg of 3.37eV at r...

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Problems solved by technology

At the same time, the deformation of the glass itself will also increase the probability of glass breakage. In the existing technology, during the cooling process of the glass, the change of the internal stress caused by the temperature change will also be superimposed on the deformation of the glass itself, which will cause the glass substrate in the cooling chamber. Increased chance of breakage during chamber cooling

The most important thing is that since the roller transmission device itself is a water cooling device, when the high-temperature glass is in contact with the roller device, it will cause a drastic change in the local temperature of the edge of the glass substrate, which will also increase the probability of the glass substrate being broken

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