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MEMS (micro-electro mechanical system) microphone circuit

A microphone and circuit technology, applied to transducer circuits, electrical components, electret electrostatic transducers, etc., can solve problems such as deviation and low yield

Inactive Publication Date: 2014-05-07
无锡纳讯微电子有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because MEMS microphones are based on silicon technology, the consistency is much better than ECM microphones, but there are still deviations
In many applications, there are certain requirements for the deviation of the sensitivity of the microphone. If the deviation is too large, the yield rate will be too low.

Method used

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Examples

Experimental program
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Embodiment Construction

[0018] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0019] figure 1 It is a structural block diagram of the MEMS microphone circuit of the present invention, which includes a MEMS acoustic-electric sensor 1 and a signal pre-amplification circuit 2. The signal pre-amplification circuit 2 is different from the traditional chip structure. In addition to the main functional modules such as the amplifier 3 and the charge pump 4, it also includes an interface control circuit 6 and an OTP (One Time Programmable, one-time programmable) memory 5 . The charge pump 4 is used to provide a bias voltage for the MEMS acoustic-electric sensor 1 , and the amplifier 3 amplifies the electrical signal generated by the MEMS acoustic-electric sensor 1 . The interface control circuit 6 is used to realize the multiplexing of the OUT pin and complete the communication with the upper computer, and read and write the ...

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PUM

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Abstract

The invention discloses an MEMS (micro-electro mechanical system) microphone circuit, which comprises an MEMS acoustoelectric sensor and a signal pre-amplifying circuit. The signal pre-amplifying circuit comprises an amplifier, a charge pump, an interface control circuit and an OTP (one time programmable) storage, wherein the charge pump and the amplifier are connected with the MEMS acoustoelectric sensor, the OTP storage is connected with the amplifier, and the interface control circuit is connected with the amplifier and the OTP storage. The invention further provides an upper computer circuit matched with the MEMS microphone circuit and a method for accessing into programming mode of the MEMS microphone circuit. Parameters of microphones which are packaged can be modified and parameters of partial defective products due to process errors can be modified so as to meet standard requirements.

Description

technical field [0001] The invention belongs to the hardware implementation of an integrated circuit (Integrated Circuit), and in particular relates to a MEMS microphone circuit structure with configurable parameters, a circuit structure of an upper computer matched with it, and a method for entering a programming mode. Background technique [0002] The microphones currently on the market mainly include dynamic, capacitive, electret and recently emerging silicon micro microphones, as well as liquid microphones and laser microphones. Dynamic microphones sound better, but are bulky. Electret Condenser Microphone (Electret Condenser Microphone) microphones are small in size and low in cost, and are widely used in telephones, mobile phones and other devices. Silicon microphones based on CMOS MEMS (Micro Electro Meganetic System, microelectromechanical system) technology are smaller in size and are especially suitable for cost-effective applications. [0003] A MEMS microphone ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04R19/01H04R3/00
Inventor 蒋振雷朱潇挺
Owner 无锡纳讯微电子有限公司