TFT array substrate and manufacturing method thereof and display device

Abstract

The invention, which relates to the display technology field, provides a thin film transistor (TFT) array substrate and a manufacturing method thereof and a display device, so that a TFT array substrate structure in an advanced super dimension switch (ADS) mode is improved to thin the thickness of the substrate and the process flow is also simplified. The TFT array substrate manufacturing method comprises: obtaining a gate line and a gate electrode on a glass substrate by processing with utilization of a first-time composition process; forming a gate insulation layer on the gate line and the gate electrode; forming a graphene layer on the gate insulation layer and carrying out processing with utilization of a second-time composition process and hydrotreating to obtain a semiconductor active layer above the gate electrode; carrying out processing with utilization of a third-time composition process to obtain a data line, a source electrode, a drain electrode and a pixel electrode at a same layer; forming a protective layer on the data line, the source electrode, the semiconductor active layer, the drain electrode and the pixel electrode; and forming a common electrode on the protective layer above the pixel electrode. According to the embodiment of the invention, the method is applied to manufacture a TFT array substrate in an ADS mode.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a TFT array substrate, a manufacturing method thereof, and a display device. Background technique [0002] TFT-LCD (Thin Film Transistor-Liquid Crystal Display, Thin Film Field Effect Transistor Liquid Crystal Display) uses the change of the electric field intensity set on the liquid crystal layer to change the degree of rotation of liquid crystal molecules, thereby controlling the intensity of light transmission to display images . Generally speaking, a complete liquid crystal display panel must have a backlight module group, a polarizer, an upper substrate (usually a color filter substrate), a lower substrate (usually an array substrate), and a box filled with the two substrates. Layers of liquid crystal molecules. On the array substrate, data lines and gate lines intersecting horizontally and vertically are formed, and the data lines and gate lines surround pixel units arra...

AI Technical Summary

Problems solved by technology

[0004] In the preparation process of the TFT array substrate in ADS mode, the preparation of the pixel electrode layer, source electrode, drain electrode and active layer is usually prepared in layers, which not only increases the thickness of the substrate, but also cumbersome process flow

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